Preparation and thermal desorption properties of dc sputtered zirconium-hydrogen-helium thin films
文献类型：期刊论文
| 作者 | Wei, Y. C.1; Shi, L. Q.1; Zhang, L.1; He, Z. J.1; Zhang, B.1; Wang, L. B.2 |
| 刊名 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
 |
| 出版日期 | 2008-11-01 |
| 卷号 | 26期号:6页码:1511-1518 |
| 关键词 | crystal microstructure desorption sputter deposition surface morphology thin films transmission electron microscopy X-ray diffraction zirconium compounds |
| ISSN号 | 0734-2101 |
| DOI | 10.1116/1.2990852 |
| 通讯作者 | Shi, L. Q.(lqshi@fudan.edu.cn) |
| 英文摘要 | We developed a new approach for preparing hydrogen and helium co-containing zirconium films (Zr-H-He) to simulate aging metal tritides. We also studied the effect of hydrogen on helium behavior, in which we applied direct current magnetron sputtering in a mixture of working gases (helium, argon, and hydrogen). The amount and depth profile of helium and hydrogen trapped in the films were determined using the elastic recoil detection analysis. The microstructure and surface morphology of the Zr-H-He films were studied by x-ray diffraction, transmission electron microscopy, and atomic force microscopy. To investigate the effect of hydrogen on the thermal release behavior of helium in the Zr film, thermal desorption spectrometry (TDS) was used, which revealed a similar desorption behavior to aged tritides. TDS experiments showed that the spectra were constituted by low-temperature peaks around 300 degrees C and high temperature peaks above 750 degrees C. Furthermore, the solid-phase alpha to delta transformation changed the shapes of the high-temperature peaks related to microstates of helium bubbles and caused the peak with a massive helium release shift toward lower temperature obviously. |
| 资助项目 | National Natural Science Foundation of China[10675034] ; National Natural Science Foundation of China[50471078] ; Shanghai Leading Academic[B107] |
| WOS研究方向 | Materials Science ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000260777100021 |
| 出版者 | A V S AMER INST PHYSICS |
| 资助机构 | National Natural Science Foundation of China ; Shanghai Leading Academic |
| 源URL | [http://ir.imr.ac.cn/handle/321006/92849]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Shi, L. Q. |
| 作者单位 | 1.Fudan Univ, Inst Modern Phys, Appl Ion Beam Phys Lab, Shanghai 20043, Peoples R China 2.Chinese Acad Sci, Inst Met Phys, Shenyang 110016, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wei, Y. C.,Shi, L. Q.,Zhang, L.,et al. Preparation and thermal desorption properties of dc sputtered zirconium-hydrogen-helium thin films[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2008,26(6):1511-1518. |
| APA | Wei, Y. C.,Shi, L. Q.,Zhang, L.,He, Z. J.,Zhang, B.,&Wang, L. B..(2008).Preparation and thermal desorption properties of dc sputtered zirconium-hydrogen-helium thin films.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,26(6),1511-1518. |
| MLA | Wei, Y. C.,et al."Preparation and thermal desorption properties of dc sputtered zirconium-hydrogen-helium thin films".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 26.6(2008):1511-1518. |
入库方式： OAI收割
来源：金属研究所
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