Effect of the Structure and Component on Refractive Index of TiO2 Film
文献类型：期刊论文
| 作者 | Liu Chengshi1,3; Wu Dengxue1,3; Zhao Lili1,3; Liao Zhijun1,3; Lu Tiecheng1,2,3 |
| 刊名 | RARE METAL MATERIALS AND ENGINEERING
 |
| 出版日期 | 2009-12-01 |
| 卷号 | 38页码:575-578 |
| 关键词 | TiO2 film refractive index electron beam evaporation |
| ISSN号 | 1002-185X |
| 通讯作者 | Wu Dengxue(wudengxue@scu.edu.cn) |
| 英文摘要 | In this work TiO2 films were prepared on silicon substrates by electron beam evaporation, and the refractive index of the films deposited at different temperature, were measured by ellipsometry. The results revealed that the refractive index was improved as increasing the deposition temperature. The structure and composition were characterized by XRD, XPS and FI-IR respectively. The XRD confirmed that the improvement of the refractive index is result from the improvement of the crystallization. And the XPS and Fi-IR confirmed that the refractive index is lower than that of bulk TiO2 due to the presence of non-stoichiometry of TiO(2-x) and SiO(2-x). |
| WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000208192600153 |
| 出版者 | NORTHWEST INST NONFERROUS METAL RESEARCH |
| 源URL | [http://ir.imr.ac.cn/handle/321006/96413]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Wu Dengxue |
| 作者单位 | 1.Sichuan Univ, Dept Phys, Chengdu 610064, Peoples R China 2.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China 3.Sichuan Univ, Key Lab Radiat Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liu Chengshi,Wu Dengxue,Zhao Lili,et al. Effect of the Structure and Component on Refractive Index of TiO2 Film[J]. RARE METAL MATERIALS AND ENGINEERING,2009,38:575-578. |
| APA | Liu Chengshi,Wu Dengxue,Zhao Lili,Liao Zhijun,&Lu Tiecheng.(2009).Effect of the Structure and Component on Refractive Index of TiO2 Film.RARE METAL MATERIALS AND ENGINEERING,38,575-578. |
| MLA | Liu Chengshi,et al."Effect of the Structure and Component on Refractive Index of TiO2 Film".RARE METAL MATERIALS AND ENGINEERING 38(2009):575-578. |
入库方式： OAI收割
来源：金属研究所
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