Fabrication and Surface Analysis of Boron Carbide Thin Films by Electron Beam Evaporation
文献类型：期刊论文
| 作者 | Yang Shuichang2; Liao Zhijun2; Liu Zhenliang2; Fan Qiang2; Wu Dengxue2; Lu Tiecheng1,2 |
| 刊名 | RARE METAL MATERIALS AND ENGINEERING
 |
| 出版日期 | 2009-12-01 |
| 卷号 | 38页码:564-567 |
| 关键词 | electron beam evaporation boron carbide thin films XRD XPS |
| ISSN号 | 1002-185X |
| 通讯作者 | Liao Zhijun() |
| 英文摘要 | Boron carbide thin films were deposited on Si (100) substrates by using electron beam evaporation. Subsequently, the film samples were characterized by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The surface morphology was analyzed with atomic force microscope (AFM). The results of XRD show that the crystallization of the boron carbide thin films meliorate gradually with increasing substrate temperature and crystalloid of the boron carbide thin films are got at more than 150 degrees C of the substrate temperature. The results of XPS show that the films' surface chemistry component is mostly B(4)C, and the boron carbide thin film's chemistry component and structural characteristic are obtained by XPS. The charts of AFM show that the thin films are compact and smooth, the RMS roughness of the boron carbide thin film rises gradually with increasing substrate temperature. |
| WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000208192600150 |
| 出版者 | NORTHWEST INST NONFERROUS METAL RESEARCH |
| 源URL | [http://ir.imr.ac.cn/handle/321006/96960]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Liao Zhijun |
| 作者单位 | 1.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China 2.Sichuan Univ, Minist Educ, Key Lab Radiat Phys & Technol, Chengdu 610064, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yang Shuichang,Liao Zhijun,Liu Zhenliang,et al. Fabrication and Surface Analysis of Boron Carbide Thin Films by Electron Beam Evaporation[J]. RARE METAL MATERIALS AND ENGINEERING,2009,38:564-567. |
| APA | Yang Shuichang,Liao Zhijun,Liu Zhenliang,Fan Qiang,Wu Dengxue,&Lu Tiecheng.(2009).Fabrication and Surface Analysis of Boron Carbide Thin Films by Electron Beam Evaporation.RARE METAL MATERIALS AND ENGINEERING,38,564-567. |
| MLA | Yang Shuichang,et al."Fabrication and Surface Analysis of Boron Carbide Thin Films by Electron Beam Evaporation".RARE METAL MATERIALS AND ENGINEERING 38(2009):564-567. |
入库方式： OAI收割
来源：金属研究所
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