Preparation and Characterization of Boron Carbide Nitrogen Thin Films
文献类型：期刊论文
| 作者 | Liu Zhenliang1; Liao Zhijun1; Fan Qiang1; Yang Shuichang1; Wu Dengxue1; Lu Tiecheng1,2 |
| 刊名 | RARE METAL MATERIALS AND ENGINEERING
 |
| 出版日期 | 2009-12-01 |
| 卷号 | 38页码:568-571 |
| 关键词 | boron carbon nitride thin films X-ray diffraction (XRD) X-ray photon electron spectroscopy (XPS) fourier-transformed infrared spectroscopy (FTIR) |
| ISSN号 | 1002-185X |
| 通讯作者 | Liao Zhijun() |
| 英文摘要 | In this paper, Boron carbon nitride thin films were deposited on Si (100) substrates using electron beam evaporation technology. The thickness was ascertained by Ellipsometer; meantime the films samples were characterized by X-ray diffraction(XRD) Fourier-transformed infrared spectroscopy and X-ray photon electron spectroscopy(XPS). The result of Ellipsometer shows that the films are even and the deposition rate is slow. The results of X-ray diffraction show the film are crystal state. At the same time the results of X-ray photon electron spectroscopy (XPS) and Fourier-transformed infrared spectroscopy show the films are atomic-level hybrids composed of B, C and N atoms. |
| WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000208192600151 |
| 出版者 | NORTHWEST INST NONFERROUS METAL RESEARCH |
| 源URL | [http://ir.imr.ac.cn/handle/321006/99316]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Liao Zhijun |
| 作者单位 | 1.Sichuan Univ, Key Lab Radiat Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China 2.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liu Zhenliang,Liao Zhijun,Fan Qiang,et al. Preparation and Characterization of Boron Carbide Nitrogen Thin Films[J]. RARE METAL MATERIALS AND ENGINEERING,2009,38:568-571. |
| APA | Liu Zhenliang,Liao Zhijun,Fan Qiang,Yang Shuichang,Wu Dengxue,&Lu Tiecheng.(2009).Preparation and Characterization of Boron Carbide Nitrogen Thin Films.RARE METAL MATERIALS AND ENGINEERING,38,568-571. |
| MLA | Liu Zhenliang,et al."Preparation and Characterization of Boron Carbide Nitrogen Thin Films".RARE METAL MATERIALS AND ENGINEERING 38(2009):568-571. |
入库方式： OAI收割
来源：金属研究所
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