INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING
文献类型：期刊论文
| 作者 | Xiao Jinquan1; Lang Wenchang1,2; Zhao Yanhui1; Gong Jun1; Sun Chao1; Wen Lishi1 |
| 刊名 | ACTA METALLURGICA SINICA
 |
| 出版日期 | 2011-05-11 |
| 卷号 | 47期号:5页码:566-572 |
| 关键词 | axisymmetric magnetic field arc ion plating macroparticle microstructure friction performance |
| ISSN号 | 0412-1961 |
| DOI | 10.3724/SP.J.1037.2010.00686 |
| 通讯作者 | Xiao Jinquan(jqxiao@imr.ac.cn) |
| 英文摘要 | Arc ion plating (AIP) has been widely used in the deposition of various kinds of thin solid films. In AIP process, cathode spot motion is the key factor because it affects the physical characteristics of arc plasma, the utilization of cathode materials, the ejection of macroparticles (MPs) and the quality of subsequent films. It has been found that the cathode spot can be steered by an external magnetic field, such as an axisymmetric magnetic field (AMF). In this work, a new AMF produced by using an adjustable electromagnetic coil associated with a concentric magnetic flux guider was applied to the cathode surface to deposit TiN films, and it was focused on the influence of the AMP on the content and size of MPs, microstructure and friction performance of TiN films. The results show that the size and number of MPs decrease significantly with the increase in the transverse component of AMF. Meanwhile, the TiN film (111) preferred orientation enhances and its grain size decreases. Furthermore, the friction coefficient of films reduces and the wear resistance of films increases. |
| WOS研究方向 | Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000291845800009 |
| 出版者 | SCIENCE CHINA PRESS |
| 源URL | [http://ir.imr.ac.cn/handle/321006/105633]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Xiao Jinquan |
| 作者单位 | 1.Chinese Acad Sci, Inst Met Res, Div Surface Engn Mat, Shenyang 110016, Peoples R China 2.Wenzhou Vocat & Tech Coll, Key Lab Mat Proc & Mould Technol, Wenzhou 325035, Peoples R China |
| 推荐引用方式 GB/T 7714 | Xiao Jinquan,Lang Wenchang,Zhao Yanhui,et al. INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING[J]. ACTA METALLURGICA SINICA,2011,47(5):566-572. |
| APA | Xiao Jinquan,Lang Wenchang,Zhao Yanhui,Gong Jun,Sun Chao,&Wen Lishi.(2011).INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING.ACTA METALLURGICA SINICA,47(5),566-572. |
| MLA | Xiao Jinquan,et al."INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING".ACTA METALLURGICA SINICA 47.5(2011):566-572. |
入库方式： OAI收割
来源：金属研究所
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