中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Microstructure and hardness of chromium oxide coatings by arc ion plating

文献类型:期刊论文

作者Ji, AL; Wang, W; Song, GH; Wang, AY; Sin, C; Wen, LS
刊名ACTA METALLURGICA SINICA
出版日期2003-09-01
卷号39期号:9页码:979-983
关键词Cr2O3 thin film arc ion plating microstructure pulse bias voltage
ISSN号0412-1961
通讯作者Ji, AL()
英文摘要Chromium oxide thin film was deposited on stainless steel by arc ion plating (ATP). The effects of the flow rate of oxygen and pulse bias voltage on the structure, deposition rate and the surface morphology of thin film were studied. The microhardness of thin film was measured at different pulse bias voltage. The results show that the Cr2O3 film has {001} plane texture at the oxygen flow rate of 130 cm(3)/s and a bias voltage of -100 V. The higher the oxygen flow rate and bias voltage, the less the big particles in the thin film. Stoichiometric Cr2O3 thin film obtained at oxygen flow rate of 130 cm(3)/s and a bias voltage of -200 V has an optimal hardness value up to 36 GPa.
WOS研究方向Metallurgy & Metallurgical Engineering
语种英语
WOS记录号WOS:000186144000016
出版者SCIENCE CHINA PRESS
源URL[http://ir.imr.ac.cn/handle/321006/117546]  
专题金属研究所_中国科学院金属研究所
通讯作者Ji, AL
作者单位Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
推荐引用方式
GB/T 7714
Ji, AL,Wang, W,Song, GH,et al. Microstructure and hardness of chromium oxide coatings by arc ion plating[J]. ACTA METALLURGICA SINICA,2003,39(9):979-983.
APA Ji, AL,Wang, W,Song, GH,Wang, AY,Sin, C,&Wen, LS.(2003).Microstructure and hardness of chromium oxide coatings by arc ion plating.ACTA METALLURGICA SINICA,39(9),979-983.
MLA Ji, AL,et al."Microstructure and hardness of chromium oxide coatings by arc ion plating".ACTA METALLURGICA SINICA 39.9(2003):979-983.

入库方式: OAI收割

来源:金属研究所

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