A new application of pulsed laser deposition to produce functional graded material thin films
文献类型：期刊论文
| 作者 | Wang, Y; Chen, M; Qi, LZ; Liu, ZL; Yao, KL; Wang, QL |
| 刊名 | FUNCTIONALLY GRADED MATERIALS VII
 |
| 出版日期 | 2003 |
| 卷号 | 423-4页码:573-575 |
| 关键词 | dual-beam laser deposition functional graded thin film composite thin film |
| ISSN号 | 0255-5476 |
| 通讯作者 | Wang, Y() |
| 英文摘要 | A new fabricating method of functional graded material (FGM) thin films characterized by continuous component distribution, based on dual-beam pulse laser deposition, was proposed in this paper. A controlled lens system splits one beam laser from one excimer laser into two beams, which are focused on two different targets in a depositing chamber, respectively. Two plasma plumes mix and deposit together on same substrate. The component of thin film changes as the intensity ratio of two beams changes. Therefore, FGM thin films with continuous graded component, instead of stepped gradient, are obtained. This method has great advantages especially for very thin FGM films, also a great potential for fabrication of composite thin films. |
| WOS研究方向 | Materials Science |
| 语种 | 英语 |
| WOS记录号 | WOS:000183317500115 |
| 出版者 | TRANS TECH PUBLICATIONS LTD |
| 源URL | [http://ir.imr.ac.cn/handle/321006/117622]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Wang, Y |
| 作者单位 | 1.Huazhong Univ Sci & Technol, Dept Phys, Wuhan 430074, Peoples R China 2.Huazhong Univ Sci & Technol, State Key Lab Laser Technol, Wuhan 430074, Peoples R China 3.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Y,Chen, M,Qi, LZ,et al. A new application of pulsed laser deposition to produce functional graded material thin films[J]. FUNCTIONALLY GRADED MATERIALS VII,2003,423-4:573-575. |
| APA | Wang, Y,Chen, M,Qi, LZ,Liu, ZL,Yao, KL,&Wang, QL.(2003).A new application of pulsed laser deposition to produce functional graded material thin films.FUNCTIONALLY GRADED MATERIALS VII,423-4,573-575. |
| MLA | Wang, Y,et al."A new application of pulsed laser deposition to produce functional graded material thin films".FUNCTIONALLY GRADED MATERIALS VII 423-4(2003):573-575. |
入库方式： OAI收割
来源：金属研究所
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