Stress-strain relationship of a TiN film adherent to substrate
文献类型：期刊论文
| 作者 | Qin, M; Ji, N; Wang, W; Chen, CR; Li, JB; Ma, SL |
| 刊名 | ACTA METALLURGICA SINICA
 |
| 出版日期 | 2003-07-11 |
| 卷号 | 39期号:7页码:721-724 |
| 关键词 | TiN film biaxial stress stress-strain relation X-ray tensile test nanoindentation |
| ISSN号 | 0412-1961 |
| 通讯作者 | Qin, M() |
| 英文摘要 | By plasma-assisted chemical vapor deposition (PACVD), TiN film with 2.5 mum thickness was deposited on a strip of spring steel 60Mn, which can be subjected to tensile stress under loading of the film/substrate. Longitudinal and transverse stresses, sigma1, and sigma2, and applied strain, Sa, for TiN film were measured by X-ray tensile test. On the basis of the experimental results, the effective stress (σ) over bar and the effective uniaxial strain (ε(t)) over bar were obtained. According to the (σ) over bar- (ε(t)) over bar relation, the calculated proof stresses, sigma(0.1) and sigma(0.2), of TiN film are 4.2 GPa and 4.4 GPa, respectively. The hardness and Young's modulus determined by nanoindenter are 25 GPa and 420 GPa, respectively. The plastic flow in TiN film occurs under tensile. |
| WOS研究方向 | Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000184627200009 |
| 出版者 | SCIENCE CHINA PRESS |
| 源URL | [http://ir.imr.ac.cn/handle/321006/117664]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Qin, M |
| 作者单位 | 1.Chinese Acad Sci, Met Res Inst, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China 2.Ecole Natl Super Arts & Metiers, CNRS, LM3, ESA 8006, F-75013 Paris, France 3.Xian Jiaotong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Qin, M,Ji, N,Wang, W,et al. Stress-strain relationship of a TiN film adherent to substrate[J]. ACTA METALLURGICA SINICA,2003,39(7):721-724. |
| APA | Qin, M,Ji, N,Wang, W,Chen, CR,Li, JB,&Ma, SL.(2003).Stress-strain relationship of a TiN film adherent to substrate.ACTA METALLURGICA SINICA,39(7),721-724. |
| MLA | Qin, M,et al."Stress-strain relationship of a TiN film adherent to substrate".ACTA METALLURGICA SINICA 39.7(2003):721-724. |
入库方式： OAI收割
来源：金属研究所
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