中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES

文献类型:期刊论文

作者Han Kechang1; Liu Yiqi1; Lin Guoqiang1; Dong Chuang1; Tai Kaiping2; Jiang Xin2
刊名ACTA METALLURGICA SINICA
出版日期2016-12-12
卷号52期号:12页码:1601-1609
ISSN号0412-1961
关键词transition-metal nitride film arc ion plating composition mechanical property strengthening mechanism
DOI10.11900/0412.1961.2016.00078
通讯作者Lin Guoqiang(gqlin@dlut.edu.cn)
英文摘要Transition-metal nitrides have long attracted considerable attention among researchers and ubiquitous applications in various fields due to their renowned mechanical properties. However almost all the discussions of the strengthening mechanism were on conventional meso scale. For further understanding on the atomic scale strengthening mechanism of transition-metal nitrides, three groups of MNx(M=Ti, Zr, Hf) films with different nitrogen contents were synthesized on the Si substrates by magnetic filtering arc ion plating. The morphologies and thickness of the as-deposited films were characterized by FESEM, the microstructures and the residual stresses were characterized by XRD, the XPS and Nano Indenter were used to measure the chemical states and hardness (also the elastic modulus) of as-deposited films, respectively. The results show that all three groups MNx films perform the B1-NaCl single-phase structure within the large composition ranges. The preferred orientation, thickness, grain size and residual stress of the MNx films with different nitrogen contents were not changed so much. While the nanohardness and elastic modulus of MNx both first increased and then decreased with the rise of nitrogen content, and the peak values all existed when x near to 0.82. The strengthening mechanism was discussed and the decisive factor of composition dependent hardness enhancement was found from the atomic-scale chemical bonding states and electronic structure in this work, rather than the conventional meso-scale factors, such as preferred orientation, grain size and residual stress.
资助项目National Natural Science Foundation of China[51271047]
WOS研究方向Metallurgy & Metallurgical Engineering
语种英语
出版者SCIENCE PRESS
WOS记录号WOS:000391244600015
资助机构National Natural Science Foundation of China
源URL[http://ir.imr.ac.cn/handle/321006/123553]  
专题金属研究所_中国科学院金属研究所
通讯作者Lin Guoqiang
作者单位1.Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Elect Beams, Dalian 116024, Peoples R China
2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
推荐引用方式
GB/T 7714
Han Kechang,Liu Yiqi,Lin Guoqiang,et al. STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES[J]. ACTA METALLURGICA SINICA,2016,52(12):1601-1609.
APA Han Kechang,Liu Yiqi,Lin Guoqiang,Dong Chuang,Tai Kaiping,&Jiang Xin.(2016).STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES.ACTA METALLURGICA SINICA,52(12),1601-1609.
MLA Han Kechang,et al."STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES".ACTA METALLURGICA SINICA 52.12(2016):1601-1609.

入库方式: OAI收割

来源:金属研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。