Polymer MEMS actuators for underwater micromanipulation
文献类型：期刊论文
| 作者 | Zhou, JWL; Chan, HY; To, TKH; Lai, KWC; Li, WJ |
| 刊名 | IEEE-ASME TRANSACTIONS ON MECHATRONICS
 |
| 出版日期 | 2004-06-01 |
| 卷号 | 9期号:2页码:334-342 |
| 关键词 | cellular grippers micro manipulation micro polymer actuators polymer MEMS actuators |
| ISSN号 | 1083-4435 |
| DOI | 10.1109/TMECH.2004.828652 |
| 通讯作者 | Zhou, JWL() |
| 英文摘要 | Conventional MEMS actuators are not suitable for underwater applications such as cell grasping due to two main reasons: 1) their required actuation voltage are typically higher than 2 V, which would cause electrolysis in water and 2) they have small displacement/deflection due to their inherent driving principles. In this paper, three-different types of novel polymer-based MEMS underwater actuators developed in our laboratory are discussed: 1) ionic conducting polymer films (ICPF) actuator, which actuates by stress gradient induced by ionic movement due to electric field; 2) parylene thermal actuator, which actuates due to the induced stress gradient across a structure made of different layers of materials with different thermal expansion coefficients; and 3) polyaniline (PANI) actuator, which actuates due to its volumetric change caused by a reversible electrochemical oxidation-reduction (redox) reaction. All these polymer micro actuators can be actuated underwater with large deflections and require less power input than conventional MEMS actuators. The experimental results from characterizing these prototype actuators are presented in this paper. |
| WOS研究方向 | Automation & Control Systems ; Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000222256500004 |
| 出版者 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| 源URL | [http://ir.imr.ac.cn/handle/321006/126070]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Zhou, JWL |
| 作者单位 | 1.Chinese Univ Hong Kong, Ctr Micro & Nano Syst, Shatin, Hong Kong, Peoples R China 2.Chinese Acad Sci, Micro & Nano Automat Lab, Shenyang, Liaoning, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhou, JWL,Chan, HY,To, TKH,et al. Polymer MEMS actuators for underwater micromanipulation[J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS,2004,9(2):334-342. |
| APA | Zhou, JWL,Chan, HY,To, TKH,Lai, KWC,&Li, WJ.(2004).Polymer MEMS actuators for underwater micromanipulation.IEEE-ASME TRANSACTIONS ON MECHATRONICS,9(2),334-342. |
| MLA | Zhou, JWL,et al."Polymer MEMS actuators for underwater micromanipulation".IEEE-ASME TRANSACTIONS ON MECHATRONICS 9.2(2004):334-342. |
入库方式： OAI收割
来源：金属研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。