Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation
文献类型：期刊论文
| 作者 | Hao LiNa1; Zhang JiangBo2; Xi Ning2 |
| 刊名 | CHINESE SCIENCE BULLETIN
 |
| 出版日期 | 2008 |
| 卷号 | 53期号:13页码:2090-2096 |
| 关键词 | GRIPPER DRIVEN BEAM AFM active probe atomic force microscopy nanomanipulation periodic-output-feedback control |
| ISSN号 | 1001-6538 |
| 其他题名 | Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation |
| 英文摘要 | Efficiency and accuracy of AFM-based nanomanipulation are still major problems to be solved, due to the nonlinearities and uncertainties, such as drift, creep, hysteresis, etc. The deformation of cantilevers caused by manipulation force is also one of the most major factors of nonlinearities and uncertainties. It causes difficulties in precise control of the tip position and causes the tip to miss the position of the object. In order to solve this problem, the traditional approach is to use a rigid cantilever. However, this will significantly reduce the sensitivity of force sensing during manipulation, which is essential for achieving an efficient and reliable nanomanipulation. In this paper, a kind of active AFM probe has been used to solve this problem by directly controlling the cantilever's flexibility or rigidity during manipulation. Based on Euller-Bernoulli Model, a kind of controller of the active probe employing Periodic-Output-Feedback (POF) law is implemented. The results of simulation and experiments have demonstrated that this theoretical model and POF controller are suitable for precise position control of nanomanipulation. |
| 语种 | 英语 |
| CSCD记录号 | CSCD:3435530 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/148846]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 作者单位 | 1.中国科学院金属研究所 2.密西根州立大学 |
| 推荐引用方式 GB/T 7714 | Hao LiNa,Zhang JiangBo,Xi Ning. Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation[J]. CHINESE SCIENCE BULLETIN,2008,53(13):2090-2096. |
| APA | Hao LiNa,Zhang JiangBo,&Xi Ning.(2008).Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation.CHINESE SCIENCE BULLETIN,53(13),2090-2096. |
| MLA | Hao LiNa,et al."Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation".CHINESE SCIENCE BULLETIN 53.13(2008):2090-2096. |
入库方式： OAI收割
来源：金属研究所
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