Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process
文献类型：期刊论文
| 作者 | Jin Jiang2; Li Na2; Xu Lu1; Wang Bo2; Jin Huiliang2 |
| 刊名 | SPECTROSCOPY AND SPECTRAL ANALYSIS
 |
| 出版日期 | 2013 |
| 卷号 | 33期号:2页码:535-539 |
| 关键词 | Atmospheric pressure Atomic emission spectroscopy Material removal rate |
| ISSN号 | 1000-0593 |
| 其他题名 | Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process |
| 英文摘要 | In the reaction of the atmospheric pressure plasma process, the heat stable process of the atmospheric pressure plasma jet has a direct impact on the removal rate, CF4 is the provider of active F* atom, O-2 is important auxiliary gas, and they play an important role in the process. In order to research the rule of the concentration of the 3 parameters upon the atmospheric pressure plasma processing, the atmospheric pressure plasma jet was used for processing and the spectrometer was used to monitor the changes in the process. The experiment indicates that: when the heat is stable, the concentration of the active F* atom essentially remains unchanged; with increasing the concentration of gas CF4, the spectrum of the active F* atom has self-absorption phenomena, so using the atomic emission spectroscopy method to monitor the changes in the concentration of active F* atom generated by CF4 is not completely exact; because O-2 can easily react with the dissociation product of CF4, which inhibits the compound of the active F* atom, so in a certain range with increasing the concentration of gas O-2, the concentration of the active F* atom becomes strong. |
| 语种 | 英语 |
| CSCD记录号 | CSCD:4745243 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/155819]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 作者单位 | 1.中国科学院金属研究所 2.Harbin Institute Technol, Ctr Precis Engn, Harbin 150001, Peoples R China |
| 推荐引用方式 GB/T 7714 | Jin Jiang,Li Na,Xu Lu,et al. Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS,2013,33(2):535-539. |
| APA | Jin Jiang,Li Na,Xu Lu,Wang Bo,&Jin Huiliang.(2013).Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process.SPECTROSCOPY AND SPECTRAL ANALYSIS,33(2),535-539. |
| MLA | Jin Jiang,et al."Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process".SPECTROSCOPY AND SPECTRAL ANALYSIS 33.2(2013):535-539. |
入库方式： OAI收割
来源：金属研究所
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