中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM

文献类型:期刊论文

作者Wei YangJie2; Wu ChengDong2; Dong ZaiLi1
刊名SCIENCE CHINA-TECHNOLOGICAL SCIENCES
出版日期2011
卷号54期号:9页码:2397-2403
关键词ATOMIC-FORCE MICROSCOPY CARBON NANOTUBES atomic force microscope (AFM) compression effect information fusion surface elasticity
ISSN号1674-7321
其他题名An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM
英文摘要Atomic force microscope (AFM), as an important instrument in micro/nano operation, has been widely used to measure sample's height information. However, the so called compression effect, due to force aroused from the contact of AFM tip with a sample surface, would result in imprecision of the surface's height measurement, i.e., the measured height is lower than expected. Up to now, there is not any effective and rapid method to attenuate this kind of measurement error. Thus, in this paper, an algorithm to obtain high accurate height measurement is proposed. Firstly, the concept of force curve is used to analyze the basic principle of the compression effect. Secondly, an automatic compensation method by fusing the height signal and the deflection signal is proposed. The proposed algorithm can also be used to obtain a surface elasticity image. Finally, in order to validate the proposed method, two experiments are conducted with respect to mutli-wall nano-carbon tubes on a silicon substrate and graphemes on a mica substrate.
资助项目[CAS]
语种英语
CSCD记录号CSCD:4424509
源URL[http://ir.imr.ac.cn/handle/321006/156832]  
专题金属研究所_中国科学院金属研究所
作者单位1.中国科学院
2.中国科学院金属研究所
推荐引用方式
GB/T 7714
Wei YangJie,Wu ChengDong,Dong ZaiLi. An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM[J]. SCIENCE CHINA-TECHNOLOGICAL SCIENCES,2011,54(9):2397-2403.
APA Wei YangJie,Wu ChengDong,&Dong ZaiLi.(2011).An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM.SCIENCE CHINA-TECHNOLOGICAL SCIENCES,54(9),2397-2403.
MLA Wei YangJie,et al."An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM".SCIENCE CHINA-TECHNOLOGICAL SCIENCES 54.9(2011):2397-2403.

入库方式: OAI收割

来源:金属研究所

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