An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM
文献类型：期刊论文
| 作者 | Wei YangJie2; Wu ChengDong2; Dong ZaiLi1 |
| 刊名 | SCIENCE CHINA-TECHNOLOGICAL SCIENCES
 |
| 出版日期 | 2011 |
| 卷号 | 54期号:9页码:2397-2403 |
| 关键词 | ATOMIC-FORCE MICROSCOPY CARBON NANOTUBES atomic force microscope (AFM) compression effect information fusion surface elasticity |
| ISSN号 | 1674-7321 |
| 其他题名 | An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM |
| 英文摘要 | Atomic force microscope (AFM), as an important instrument in micro/nano operation, has been widely used to measure sample's height information. However, the so called compression effect, due to force aroused from the contact of AFM tip with a sample surface, would result in imprecision of the surface's height measurement, i.e., the measured height is lower than expected. Up to now, there is not any effective and rapid method to attenuate this kind of measurement error. Thus, in this paper, an algorithm to obtain high accurate height measurement is proposed. Firstly, the concept of force curve is used to analyze the basic principle of the compression effect. Secondly, an automatic compensation method by fusing the height signal and the deflection signal is proposed. The proposed algorithm can also be used to obtain a surface elasticity image. Finally, in order to validate the proposed method, two experiments are conducted with respect to mutli-wall nano-carbon tubes on a silicon substrate and graphemes on a mica substrate. |
| 资助项目 | [CAS] |
| 语种 | 英语 |
| CSCD记录号 | CSCD:4424509 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/156832]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 作者单位 | 1.中国科学院 2.中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Wei YangJie,Wu ChengDong,Dong ZaiLi. An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM[J]. SCIENCE CHINA-TECHNOLOGICAL SCIENCES,2011,54(9):2397-2403. |
| APA | Wei YangJie,Wu ChengDong,&Dong ZaiLi.(2011).An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM.SCIENCE CHINA-TECHNOLOGICAL SCIENCES,54(9),2397-2403. |
| MLA | Wei YangJie,et al."An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM".SCIENCE CHINA-TECHNOLOGICAL SCIENCES 54.9(2011):2397-2403. |
入库方式： OAI收割
来源：金属研究所
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