Critical-dimension scanning electron microscope characterization of smoothly varying wave structures with a Monte Carlo simulation
文献类型：期刊论文
| 作者 | Khan, M. S. S.1,2; Yang, L. H.1,2; Deng, X.3 ; Mao, S. F.4; Zou, Y. B.5; Li, Y. G.6; Li, H. M.7; Ding, Z. J.1,2
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| 刊名 | JOURNAL OF PHYSICS D-APPLIED PHYSICS
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| 出版日期 | 2021-11-04 |
| 卷号 | 54 |
| 关键词 | linescan nano characterization CD-SEM Monte Carlo simulation atom lithography |
| ISSN号 | 0022-3727 |
| DOI | 10.1088/1361-6463/ac0de5 |
| 通讯作者 | Deng, X.(1110490dengxiao@tongji.edu.cn) ; Zou, Y. B.(zyb0617@mail.ustc.edu.cn) ; Ding, Z. J.(zjding@ustc.edu.cn) |
| 英文摘要 | Scanning electron microscopy (SEM) characterization of a smoothly varying nanograting structure (a Pt-coated Cr grid on a Si substrate) with a sinusoidal waveform has been carried out by a Monte Carlo (MC) simulation technique. Previous studies with critical-dimension (CD) SEM (CD-SEM) have mostly concerned line structures with sharp edges so that there is an obvious edge bloom in the linescan profile of secondary electrons. In contrast, the present grating structures prepared by a laser-focused atomic deposition technique have a smoothly varying waveform in the cross-sectional profile, which pose greater difficulty for quantitative structural characterization by SEM. The grating structure, with a fixed pitch of lambda/2 as the period of the standing-wave laser light field, where lambda is the wavelength of the corresponding laser light, can be used as an ideal nanoscale metrological length tool; therefore, it is important to characterize its structural features over a large deposited area by SEM imaging for quality control, with the aim of mass reproduction. The present work extends the CD characterization of MC simulation methods to more complex structures. Taking into account different experimental factors, i.e. primary electron beam parameters, geometrical parameters and material properties, the unknown geometrical parameters (i.e. base height, peak height, linewidth shrinkage and peak tilt angle) of the grating lines have been successfully extracted from the experimental linescan profiles of SEM images. |
| WOS关键词 | SECONDARY-ELECTRON ; ATOM LITHOGRAPHY ; SEM ; IMAGES ; SCATTERING ; LINEWIDTH ; METROLOGY ; NANOFABRICATION ; DEPOSITION ; PROFILE |
| 资助项目 | National Key Research and Development Project[2019YFF0216404] ; National Key Research and Development Project[2019YFF0216401] ; National Natural Science Foundation of China[11864041] ; National Natural Science Foundation of China[11975018] ; National Natural Science Foundation of China[11775254] ; National MCF Energy RD Program[2018YEF0308100] ; Science Challenge Project[TZ2018004] ; Youth Innovation Promotion Association CAS ; Chinese Education Ministry through the '111' Project 2.0[BP0719016] |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000684705000001 |
| 出版者 | IOP PUBLISHING LTD |
| 资助机构 | National Key Research and Development Project ; National Natural Science Foundation of China ; National MCF Energy RD Program ; Science Challenge Project ; Youth Innovation Promotion Association CAS ; Chinese Education Ministry through the '111' Project 2.0 |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/124444]  |
| 专题 | 中国科学院合肥物质科学研究院 |
| 通讯作者 | Deng, X.; Zou, Y. B.; Ding, Z. J. |
| 作者单位 | 1.Univ Sci & Technol China, Dept Phys, Hefei 230026, Anhui, Peoples R China 2.Univ Sci & Technol China, Hefei Natl Lab Phys Sci Microscale, Hefei 230026, Anhui, Peoples R China 3.Tongji Univ, Inst Precis Opt, Dept Phys Sci & Engn, Shanghai 200092, Peoples R China 4.Univ Sci & Technol China, Dept Engn & Appl Phys, Hefei 230026, Anhui, Peoples R China 5.Xinjiang Normal Univ, Sch Phys & Elect Engn, Urumqi 830054, Xinjiang, Peoples R China 6.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei 230031, Anhui, Peoples R China 7.Univ Sci & Technol China, Super Computat Ctr, Hefei 230026, Anhui, Peoples R China |
| 推荐引用方式 GB/T 7714 | Khan, M. S. S.,Yang, L. H.,Deng, X.,et al. Critical-dimension scanning electron microscope characterization of smoothly varying wave structures with a Monte Carlo simulation[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2021,54. |
| APA | Khan, M. S. S..,Yang, L. H..,Deng, X..,Mao, S. F..,Zou, Y. B..,...&Ding, Z. J..(2021).Critical-dimension scanning electron microscope characterization of smoothly varying wave structures with a Monte Carlo simulation.JOURNAL OF PHYSICS D-APPLIED PHYSICS,54. |
| MLA | Khan, M. S. S.,et al."Critical-dimension scanning electron microscope characterization of smoothly varying wave structures with a Monte Carlo simulation".JOURNAL OF PHYSICS D-APPLIED PHYSICS 54(2021). |
入库方式： OAI收割
来源：合肥物质科学研究院
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