Flexible graphene-assisted van der Waals epitaxy growth of crack-free AlN epilayer on SiC by lattice engineering
文献类型：期刊论文
| 作者 | Yunyu Wang; Shenyuan Yang; Hongliang Chang; Weijiang Li; Xiufang Chend; Rui Hou; Jianchang Yan; Xiaoyan Yi; Junxi Wang; Tongbo Wei |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2020 |
| 卷号 | 520页码:146358 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30437]  |
| 专题 | 半导体研究所_中科院半导体照明研发中心 |
| 推荐引用方式 GB/T 7714 | Yunyu Wang; Shenyuan Yang; Hongliang Chang; Weijiang Li; Xiufang Chend; Rui Hou; Jianchang Yan; Xiaoyan Yi; Junxi Wang; Tongbo Wei. Flexible graphene-assisted van der Waals epitaxy growth of crack-free AlN epilayer on SiC by lattice engineering[J]. APPLIED SURFACE SCIENCE,2020,520:146358. |
| APA | Yunyu Wang; Shenyuan Yang; Hongliang Chang; Weijiang Li; Xiufang Chend; Rui Hou; Jianchang Yan; Xiaoyan Yi; Junxi Wang; Tongbo Wei.(2020).Flexible graphene-assisted van der Waals epitaxy growth of crack-free AlN epilayer on SiC by lattice engineering.APPLIED SURFACE SCIENCE,520,146358. |
| MLA | Yunyu Wang; Shenyuan Yang; Hongliang Chang; Weijiang Li; Xiufang Chend; Rui Hou; Jianchang Yan; Xiaoyan Yi; Junxi Wang; Tongbo Wei."Flexible graphene-assisted van der Waals epitaxy growth of crack-free AlN epilayer on SiC by lattice engineering".APPLIED SURFACE SCIENCE 520(2020):146358. |
入库方式： OAI收割
来源：半导体研究所
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