3D Dielectric Layer Enabled Highly Sensitive Capacitive Pressure Sensors for Wearable Electronics
文献类型：期刊论文
| 作者 | Shufang Zhao; Wenhao Ran; Depeng Wang; Ruiyang Yin; Yongxu Yan; Kai Jiang; Zheng Lou; Guozhen Shen |
| 刊名 | ACS APPLIED MATERIALS & INTERFACES
 |
| 出版日期 | 2020 |
| 卷号 | 12期号:28页码:32023-32030 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30451]  |
| 专题 | 半导体研究所_半导体超晶格国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Shufang Zhao; Wenhao Ran; Depeng Wang; Ruiyang Yin; Yongxu Yan; Kai Jiang; Zheng Lou; Guozhen Shen. 3D Dielectric Layer Enabled Highly Sensitive Capacitive Pressure Sensors for Wearable Electronics[J]. ACS APPLIED MATERIALS & INTERFACES,2020,12(28):32023-32030. |
| APA | Shufang Zhao; Wenhao Ran; Depeng Wang; Ruiyang Yin; Yongxu Yan; Kai Jiang; Zheng Lou; Guozhen Shen.(2020).3D Dielectric Layer Enabled Highly Sensitive Capacitive Pressure Sensors for Wearable Electronics.ACS APPLIED MATERIALS & INTERFACES,12(28),32023-32030. |
| MLA | Shufang Zhao; Wenhao Ran; Depeng Wang; Ruiyang Yin; Yongxu Yan; Kai Jiang; Zheng Lou; Guozhen Shen."3D Dielectric Layer Enabled Highly Sensitive Capacitive Pressure Sensors for Wearable Electronics".ACS APPLIED MATERIALS & INTERFACES 12.28(2020):32023-32030. |
入库方式： OAI收割
来源：半导体研究所
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