中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Microstructure and Properties of WB2/Cr Multilayer Films with Different Bilayer Numbers Deposited by Magnetron Sputtering

文献类型:期刊论文

作者Shi, W. B.1,2; Liu, Y. M.3; Li, W. H.1,2; Li, T.1,2; Lei, H.2; Gong, J.2; Sun, C.2
刊名ACTA METALLURGICA SINICA-ENGLISH LETTERS
出版日期2021-08-09
页码10
关键词WB2 Cr multilayer Magnetron sputtering Bilayer number Tribological behavior
ISSN号1006-7191
DOI10.1007/s40195-021-01285-3
通讯作者Sun, C.(csun@imr.ac.cn)
英文摘要The influence of the bilayer number on the microstructure, mechanical properties, adhesion strength and tribological behaviors of the WB2/Cr multilayer films was systematically investigated in the present study. Five groups of WB2/Cr films with the same modulation ratio were synthesized by magnetron sputtering technique. The crystalline structure of the films was determined by X-ray diffraction. The morphologies and the microstructure of the films were observed by scanning electron microscopy, atomic force microscopy and transmission electron microscopy. Furthermore, Nano indenter, scratch tester and ball-on-disc tribometer were used to evaluate the mechanical and tribological properties. As bilayer numbers varied from 5 to 40, the hardness increased first and then decreased with the maximum hardness of 33.9 GPa when the bilayer number is 30. The H/E* and H-3/E-*2 values calculated to evaluate the fracture toughness showed the similar changing trend with hardness. The adhesion strength reached the maximum of 67 N when the bilayer number is 30. The surface roughness and friction coefficient decreased with increasing bilayer number. The wear mechanism was also investigated, and the results suggested that the multilayer film with bilayer number of 30 exhibited the best wear resistance (1.78 x 10(-7) mm(3)/Nm), benefiting from the contribution of high hardness, fracture toughness and adhesion strength.
资助项目National Natural Science Foundation of China[51701157]
WOS研究方向Metallurgy & Metallurgical Engineering
语种英语
WOS记录号WOS:000683323900001
出版者CHINESE ACAD SCIENCES, INST METAL RESEARCH
资助机构National Natural Science Foundation of China
源URL[http://ir.imr.ac.cn/handle/321006/159541]  
专题金属研究所_中国科学院金属研究所
通讯作者Sun, C.
作者单位1.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China
2.Chinese Acad Sci, Shi Changxu Innovat Ctr Adv Mat, Inst Met Res, Shenyang 110016, Peoples R China
3.Xian Shiyou Univ, Coll Mat Sci & Engn, Xian 710065, Peoples R China
推荐引用方式
GB/T 7714
Shi, W. B.,Liu, Y. M.,Li, W. H.,et al. Microstructure and Properties of WB2/Cr Multilayer Films with Different Bilayer Numbers Deposited by Magnetron Sputtering[J]. ACTA METALLURGICA SINICA-ENGLISH LETTERS,2021:10.
APA Shi, W. B..,Liu, Y. M..,Li, W. H..,Li, T..,Lei, H..,...&Sun, C..(2021).Microstructure and Properties of WB2/Cr Multilayer Films with Different Bilayer Numbers Deposited by Magnetron Sputtering.ACTA METALLURGICA SINICA-ENGLISH LETTERS,10.
MLA Shi, W. B.,et al."Microstructure and Properties of WB2/Cr Multilayer Films with Different Bilayer Numbers Deposited by Magnetron Sputtering".ACTA METALLURGICA SINICA-ENGLISH LETTERS (2021):10.

入库方式: OAI收割

来源:金属研究所

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