中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering

文献类型:期刊论文

作者Shi, W. B.1,2; Liu, Y. M.3; Li, W. H.1,2; Liu, J. H.1,2; Lei, H.1; Gong, J.1; Sun, C.1
刊名CERAMICS INTERNATIONAL
出版日期2021-07-15
卷号47期号:14页码:19678-19686
ISSN号0272-8842
关键词WB2/Cr multilayer Modulation ratio Indentation toughness Tribological behavior
DOI10.1016/j.ceramint.2021.03.305
通讯作者Sun, C.(csun@imr.ac.cn)
英文摘要WB2/Cr multilayer films with different modulation ratios (lambda = 1, 3, 5, 7, 12, and 20) were deposited by a combination of direct-current and pulse direct-current magnetron sputtering, and the number of bilayers was fixed at ten. The effect of the modulation ratio on the microstructure, mechanical and tribological properties of the multilayer films was investigated in detail. X-ray diffraction demonstrates that a preferred orientation of WB2 (101) and Cr (110) exists, and WB2 (101) dominates the film's growth with increasing of modulation ratio. The TEM results show that the multilayer films consist of nanograins dispersed in an amorphous matrix in WB2 layers and polycrystalline grains in Cr layers. The hardness increases with the increasing modulation ratio, and the maximum hardness (31.1 GPa) is obtained at lambda = 20. The indentation toughness presents an opposite changing trend, and the maximum indentation toughness (1.264 MPa m(1/2)) is obtained in S1 at lambda = 1 which conforms to the rule of mixture due to the relatively thick bilayer thickness (Lambda = 160-192 nm). The wear mechanism is investigated, and the results suggest that the multilayer film with lambda = 7 possesses the best wear resistance (2.06 x 10(-7) mm(3)/Nm), benefiting from the balance of hardness and indentation toughness.
资助项目Natural Science Foundation of China[51701157]
WOS研究方向Materials Science
语种英语
出版者ELSEVIER SCI LTD
WOS记录号WOS:000663793100003
资助机构Natural Science Foundation of China
源URL[http://ir.imr.ac.cn/handle/321006/160530]  
专题金属研究所_中国科学院金属研究所
通讯作者Sun, C.
作者单位1.Chinese Acad Sci, Shi Changxu Innovat Ctr Adv Mat, Inst Met Res, 72 Wenhua Rd, Shenyang 110016, Peoples R China
2.Univ Sci & Technol China, Sch Mat Sci & Engn, 72 Wenhua Rd, Shenyang 110016, Peoples R China
3.Xian Shiyou Univ, Coll Mat Sci & Engn, Xian 710065, Peoples R China
推荐引用方式
GB/T 7714
Shi, W. B.,Liu, Y. M.,Li, W. H.,et al. Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering[J]. CERAMICS INTERNATIONAL,2021,47(14):19678-19686.
APA Shi, W. B..,Liu, Y. M..,Li, W. H..,Liu, J. H..,Lei, H..,...&Sun, C..(2021).Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering.CERAMICS INTERNATIONAL,47(14),19678-19686.
MLA Shi, W. B.,et al."Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering".CERAMICS INTERNATIONAL 47.14(2021):19678-19686.

入库方式: OAI收割

来源:金属研究所

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