Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering
文献类型:期刊论文
作者 | Shi, W. B.1,2; Liu, Y. M.3; Li, W. H.1,2; Liu, J. H.1,2; Lei, H.1; Gong, J.1; Sun, C.1 |
刊名 | CERAMICS INTERNATIONAL |
出版日期 | 2021-07-15 |
卷号 | 47期号:14页码:19678-19686 |
ISSN号 | 0272-8842 |
关键词 | WB2/Cr multilayer Modulation ratio Indentation toughness Tribological behavior |
DOI | 10.1016/j.ceramint.2021.03.305 |
通讯作者 | Sun, C.(csun@imr.ac.cn) |
英文摘要 | WB2/Cr multilayer films with different modulation ratios (lambda = 1, 3, 5, 7, 12, and 20) were deposited by a combination of direct-current and pulse direct-current magnetron sputtering, and the number of bilayers was fixed at ten. The effect of the modulation ratio on the microstructure, mechanical and tribological properties of the multilayer films was investigated in detail. X-ray diffraction demonstrates that a preferred orientation of WB2 (101) and Cr (110) exists, and WB2 (101) dominates the film's growth with increasing of modulation ratio. The TEM results show that the multilayer films consist of nanograins dispersed in an amorphous matrix in WB2 layers and polycrystalline grains in Cr layers. The hardness increases with the increasing modulation ratio, and the maximum hardness (31.1 GPa) is obtained at lambda = 20. The indentation toughness presents an opposite changing trend, and the maximum indentation toughness (1.264 MPa m(1/2)) is obtained in S1 at lambda = 1 which conforms to the rule of mixture due to the relatively thick bilayer thickness (Lambda = 160-192 nm). The wear mechanism is investigated, and the results suggest that the multilayer film with lambda = 7 possesses the best wear resistance (2.06 x 10(-7) mm(3)/Nm), benefiting from the balance of hardness and indentation toughness. |
资助项目 | Natural Science Foundation of China[51701157] |
WOS研究方向 | Materials Science |
语种 | 英语 |
出版者 | ELSEVIER SCI LTD |
WOS记录号 | WOS:000663793100003 |
资助机构 | Natural Science Foundation of China |
源URL | [http://ir.imr.ac.cn/handle/321006/160530] |
专题 | 金属研究所_中国科学院金属研究所 |
通讯作者 | Sun, C. |
作者单位 | 1.Chinese Acad Sci, Shi Changxu Innovat Ctr Adv Mat, Inst Met Res, 72 Wenhua Rd, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, 72 Wenhua Rd, Shenyang 110016, Peoples R China 3.Xian Shiyou Univ, Coll Mat Sci & Engn, Xian 710065, Peoples R China |
推荐引用方式 GB/T 7714 | Shi, W. B.,Liu, Y. M.,Li, W. H.,et al. Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering[J]. CERAMICS INTERNATIONAL,2021,47(14):19678-19686. |
APA | Shi, W. B..,Liu, Y. M..,Li, W. H..,Liu, J. H..,Lei, H..,...&Sun, C..(2021).Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering.CERAMICS INTERNATIONAL,47(14),19678-19686. |
MLA | Shi, W. B.,et al."Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering".CERAMICS INTERNATIONAL 47.14(2021):19678-19686. |
入库方式: OAI收割
来源:金属研究所
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