FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING
文献类型：期刊论文
| 作者 | ZHU, DZ（朱德彰） ; PAN, HC ; ZHU, FY（朱福英） ; CAO, JQ（曹建清） ; CAO, DX（曹德新） |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1989 |
| 卷号 | 39期号:41278 |
| ISSN号 | 0168-583X |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-11 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/12948]  |
| 专题 | 上海应用物理研究所_中科院上海原子核所2003年前 |
| 推荐引用方式 GB/T 7714 | ZHU, DZ,PAN, HC,ZHU, FY,et al. FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1989,39(41278). |
| APA | ZHU, DZ,PAN, HC,ZHU, FY,CAO, JQ,&CAO, DX.(1989).FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,39(41278). |
| MLA | ZHU, DZ,et al."FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 39.41278(1989). |
入库方式： OAI收割
来源：上海应用物理研究所
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