TI SILICIDE FORMATION USING AS ION-BEAM MIXING
文献类型：期刊论文
| 作者 | YU, N ; ZHOU, ZY ; ZHOU, W ; TSOU, SC ; ZHU, DZ（朱德彰） |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1987 |
| 卷号 | 41324 |
| ISSN号 | 0168-583X |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:A1987G386000064 |
| 公开日期 | 2013-09-11 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/13010]  |
| 专题 | 上海应用物理研究所_中科院上海原子核所2003年前 |
| 推荐引用方式 GB/T 7714 | YU, N,ZHOU, ZY,ZHOU, W,et al. TI SILICIDE FORMATION USING AS ION-BEAM MIXING[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1987,41324. |
| APA | YU, N,ZHOU, ZY,ZHOU, W,TSOU, SC,&ZHU, DZ.(1987).TI SILICIDE FORMATION USING AS ION-BEAM MIXING.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,41324. |
| MLA | YU, N,et al."TI SILICIDE FORMATION USING AS ION-BEAM MIXING".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 41324(1987). |
入库方式： OAI收割
来源：上海应用物理研究所
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