Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films
文献类型：期刊论文
| 作者 | Rakha, SA ; Yu, GJ（俞国军） ; Cao, JQ（曹建清） |
| 刊名 | JOURNAL OF EXPERIMENTAL NANOSCIENCE
 |
| 出版日期 | 2012 |
| 卷号 | 7期号:4 |
| ISSN号 | 1745-8080 |
| 英文摘要 | Hydrogen-incorporated nanocrystalline diamond thin films have been deposited in microwave plasma enhanced chemical vapour deposition (CVD) system with various hydrogen concentrations in the Ar/CH4 gas mixture. The bonding environment of carbon atoms was detected by Raman spectroscopy and the hydrogen concentration was determined by elastic recoil detection analysis. Incorporation of H-2 species into Ar-rich plasma was observed to markedly alter the microstructure of diamond films. Raman spectroscopy results showed that part of the hydrogen is bonded to carbon atoms. Raman spectra also indicated the increase of non-diamond phase with the decrease in crystallite size. The study addresses the effects of hydrogen trapping in the samples when hydrogen concentration in the plasma increased during diamond growth and its relation with defective grain boundary region. |
| 语种 | 英语 |
| WOS记录号 | WOS:000305559500003 |
| 公开日期 | 2013-09-11 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/13110]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 推荐引用方式 GB/T 7714 | Rakha, SA,Yu, GJ,Cao, JQ. Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films[J]. JOURNAL OF EXPERIMENTAL NANOSCIENCE,2012,7(4). |
| APA | Rakha, SA,Yu, GJ,&Cao, JQ.(2012).Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films.JOURNAL OF EXPERIMENTAL NANOSCIENCE,7(4). |
| MLA | Rakha, SA,et al."Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films".JOURNAL OF EXPERIMENTAL NANOSCIENCE 7.4(2012). |
入库方式： OAI收割
来源：上海应用物理研究所
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