The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification
文献类型:期刊论文
; | |
作者 | Li,Cun1; Zhang,Quanwei1; Zhao,Yulong1; Tian,Chuan2![]() |
刊名 | Journal of Micromechanics and Microengineering
![]() ![]() |
出版日期 | 2021-09-23 ; 2021-09-23 |
卷号 | 31期号:11页码:13 |
关键词 | resonant sensor resonant sensor quality factor quartz DETF structural damping air damping quality factor quartz DETF structural damping air damping |
ISSN号 | 0960-1317 ; 0960-1317 |
DOI | 10.1088/1361-6439/ac266b ; 10.1088/1361-6439/ac266b |
通讯作者 | Zhang,Quanwei |
目次 | 否 |
英文摘要 | AbstractDue to the excellent material properties of crystal quartz and its simple and effective structure, the quartz double ended tuning fork (DETF) is widely used as a resonance sensing element in resonator sensors, where its quality factor has an important effect on the overall accuracy and stability of such sensors. To optimise the quality factor of quartz DETF, the influence of structural dimensions on structural and air damping is analysed, and the theoretical model used to calculate the quality factor is summarised. Further, under the premise of fabricating resonators with sufficient force–frequency sensitivity, the quality factors of quartz DETFs of different structural dimensions are simulated through finite element simulation. The theoretical model and simulation calculation of the quality factor of quartz DETFs mutually verify its effectiveness. Moreover, an experimental platform was built, and three quartz DETFs with different dimensions were fabricated to test their quality factor. The quality factors of the three DETFs in air and vacuum are 3467.3, 1925.8, 4442.4 and 32 997.6, 11 559.1, 24 795.7, respectively, which means that the environmental factors and their structural dimensions have a great influence on quality factor. With the simulation method and summarised theoretical model in this paper, the quality factor was studied with comprehensive structural damping (thermal damping loss and support loss) and air damping (resistance damping, slide film damping, and squeeze film damping). The influence of the structure size on the quality factor was analysed in detail, including the length of the decoupling region, the distance between the tines, and the length and width of the tines, and the main influencing factors were obtained, providing a basic and comprehensive reference for designing quartz DETF.; AbstractDue to the excellent material properties of crystal quartz and its simple and effective structure, the quartz double ended tuning fork (DETF) is widely used as a resonance sensing element in resonator sensors, where its quality factor has an important effect on the overall accuracy and stability of such sensors. To optimise the quality factor of quartz DETF, the influence of structural dimensions on structural and air damping is analysed, and the theoretical model used to calculate the quality factor is summarised. Further, under the premise of fabricating resonators with sufficient force–frequency sensitivity, the quality factors of quartz DETFs of different structural dimensions are simulated through finite element simulation. The theoretical model and simulation calculation of the quality factor of quartz DETFs mutually verify its effectiveness. Moreover, an experimental platform was built, and three quartz DETFs with different dimensions were fabricated to test their quality factor. The quality factors of the three DETFs in air and vacuum are 3467.3, 1925.8, 4442.4 and 32 997.6, 11 559.1, 24 795.7, respectively, which means that the environmental factors and their structural dimensions have a great influence on quality factor. With the simulation method and summarised theoretical model in this paper, the quality factor was studied with comprehensive structural damping (thermal damping loss and support loss) and air damping (resistance damping, slide film damping, and squeeze film damping). The influence of the structure size on the quality factor was analysed in detail, including the length of the decoupling region, the distance between the tines, and the length and width of the tines, and the main influencing factors were obtained, providing a basic and comprehensive reference for designing quartz DETF. |
WOS关键词 | TUNING FORK RESONATOR ; TUNING FORK RESONATOR |
资助项目 | National Key R&D Program of China[2019YFC1408600] ; National Key R&D Program of China[2019YFC1408600] ; Natural Science Foundation of China[51805424] ; Postdoctoral Science Foundation of China[2018M633501] ; Natural Science Foundation of China[51805424] ; Postdoctoral Science Foundation of China[2018M633501] |
WOS研究方向 | Engineering ; Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics |
语种 | 英语 ; 英语 |
WOS记录号 | IOP:0960-1317-31-11-AC266B ; IOP:0960-1317-31-11-AC266B |
出版者 | IOP Publishing ; IOP Publishing |
资助机构 | National Key R&D Program of China ; National Key R&D Program of China ; Natural Science Foundation of China ; Postdoctoral Science Foundation of China ; Natural Science Foundation of China ; Postdoctoral Science Foundation of China |
源URL | [http://ir.idsse.ac.cn/handle/183446/8832] ![]() |
专题 | 深海工程技术部_深海信息技术研究室 |
通讯作者 | Zhang,Quanwei |
作者单位 | 1.State Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi 710049, People’s Republic of China 2.Institute of Deep-sea Science and Engineering, Chinese Academy of Sciences, Sanya City, Hainan Province 572000, People’s Republic of China |
推荐引用方式 GB/T 7714 | Li,Cun,Zhang,Quanwei,Zhao,Yulong,et al. The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification, The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification[J]. Journal of Micromechanics and Microengineering, Journal of Micromechanics and Microengineering,2021, 2021,31, 31(11):13, 13. |
APA | Li,Cun.,Zhang,Quanwei.,Zhao,Yulong.,Tian,Chuan.,Li,Bo.,...&Bai,Bing.(2021).The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification.Journal of Micromechanics and Microengineering,31(11),13. |
MLA | Li,Cun,et al."The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification".Journal of Micromechanics and Microengineering 31.11(2021):13. |
入库方式: OAI收割
来源:深海科学与工程研究所
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。