中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification

文献类型:期刊论文

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作者Li,Cun1; Zhang,Quanwei1; Zhao,Yulong1; Tian,Chuan2; Li,Bo1; Han,Chao1; Bai,Bing1
刊名Journal of Micromechanics and Microengineering ; Journal of Micromechanics and Microengineering
出版日期2021-09-23 ; 2021-09-23
卷号31期号:11页码:13
关键词resonant sensor resonant sensor quality factor quartz DETF structural damping air damping quality factor quartz DETF structural damping air damping
ISSN号0960-1317 ; 0960-1317
DOI10.1088/1361-6439/ac266b ; 10.1088/1361-6439/ac266b
通讯作者Zhang,Quanwei
目次
英文摘要AbstractDue to the excellent material properties of crystal quartz and its simple and effective structure, the quartz double ended tuning fork (DETF) is widely used as a resonance sensing element in resonator sensors, where its quality factor has an important effect on the overall accuracy and stability of such sensors. To optimise the quality factor of quartz DETF, the influence of structural dimensions on structural and air damping is analysed, and the theoretical model used to calculate the quality factor is summarised. Further, under the premise of fabricating resonators with sufficient force–frequency sensitivity, the quality factors of quartz DETFs of different structural dimensions are simulated through finite element simulation. The theoretical model and simulation calculation of the quality factor of quartz DETFs mutually verify its effectiveness. Moreover, an experimental platform was built, and three quartz DETFs with different dimensions were fabricated to test their quality factor. The quality factors of the three DETFs in air and vacuum are 3467.3, 1925.8, 4442.4 and 32 997.6, 11 559.1, 24 795.7, respectively, which means that the environmental factors and their structural dimensions have a great influence on quality factor. With the simulation method and summarised theoretical model in this paper, the quality factor was studied with comprehensive structural damping (thermal damping loss and support loss) and air damping (resistance damping, slide film damping, and squeeze film damping). The influence of the structure size on the quality factor was analysed in detail, including the length of the decoupling region, the distance between the tines, and the length and width of the tines, and the main influencing factors were obtained, providing a basic and comprehensive reference for designing quartz DETF.;

AbstractDue to the excellent material properties of crystal quartz and its simple and effective structure, the quartz double ended tuning fork (DETF) is widely used as a resonance sensing element in resonator sensors, where its quality factor has an important effect on the overall accuracy and stability of such sensors. To optimise the quality factor of quartz DETF, the influence of structural dimensions on structural and air damping is analysed, and the theoretical model used to calculate the quality factor is summarised. Further, under the premise of fabricating resonators with sufficient force–frequency sensitivity, the quality factors of quartz DETFs of different structural dimensions are simulated through finite element simulation. The theoretical model and simulation calculation of the quality factor of quartz DETFs mutually verify its effectiveness. Moreover, an experimental platform was built, and three quartz DETFs with different dimensions were fabricated to test their quality factor. The quality factors of the three DETFs in air and vacuum are 3467.3, 1925.8, 4442.4 and 32 997.6, 11 559.1, 24 795.7, respectively, which means that the environmental factors and their structural dimensions have a great influence on quality factor. With the simulation method and summarised theoretical model in this paper, the quality factor was studied with comprehensive structural damping (thermal damping loss and support loss) and air damping (resistance damping, slide film damping, and squeeze film damping). The influence of the structure size on the quality factor was analysed in detail, including the length of the decoupling region, the distance between the tines, and the length and width of the tines, and the main influencing factors were obtained, providing a basic and comprehensive reference for designing quartz DETF.

WOS关键词TUNING FORK RESONATOR ; TUNING FORK RESONATOR
资助项目National Key R&D Program of China[2019YFC1408600] ; National Key R&D Program of China[2019YFC1408600] ; Natural Science Foundation of China[51805424] ; Postdoctoral Science Foundation of China[2018M633501] ; Natural Science Foundation of China[51805424] ; Postdoctoral Science Foundation of China[2018M633501]
WOS研究方向Engineering ; Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
语种英语 ; 英语
WOS记录号IOP:0960-1317-31-11-AC266B ; IOP:0960-1317-31-11-AC266B
出版者IOP Publishing ; IOP Publishing
资助机构National Key R&D Program of China ; National Key R&D Program of China ; Natural Science Foundation of China ; Postdoctoral Science Foundation of China ; Natural Science Foundation of China ; Postdoctoral Science Foundation of China
源URL[http://ir.idsse.ac.cn/handle/183446/8832]  
专题深海工程技术部_深海信息技术研究室
通讯作者Zhang,Quanwei
作者单位1.State Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi 710049, People’s Republic of China
2.Institute of Deep-sea Science and Engineering, Chinese Academy of Sciences, Sanya City, Hainan Province 572000, People’s Republic of China
推荐引用方式
GB/T 7714
Li,Cun,Zhang,Quanwei,Zhao,Yulong,et al. The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification, The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification[J]. Journal of Micromechanics and Microengineering, Journal of Micromechanics and Microengineering,2021, 2021,31, 31(11):13, 13.
APA Li,Cun.,Zhang,Quanwei.,Zhao,Yulong.,Tian,Chuan.,Li,Bo.,...&Bai,Bing.(2021).The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification.Journal of Micromechanics and Microengineering,31(11),13.
MLA Li,Cun,et al."The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification".Journal of Micromechanics and Microengineering 31.11(2021):13.

入库方式: OAI收割

来源:深海科学与工程研究所

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