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Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods

文献类型：期刊论文

作者Guo, Xin1; Quan, Xiangqian2; Li, Zizheng3; Li, Qiang3; Zhang, Binzhi4; Zhang, Xin4; Song, Chi5
刊名COATINGS
出版日期2021-05-01
卷号11期号:5页码:10
关键词antireflection coating broadband oblique angle deposition precise time controlled deposition
DOI10.3390/coatings11050492
英文摘要Broadband anti-reflection (AR) coatings are essential elements for improving the photocurrent generation of photovoltaic modules and enhancing visibility in optical devices. In this paper, we report a hybrid-structured, anti-reflection coating that combines multi-layer thin films with a single top-oblique deposited layer. By simply introducing this low-refractive index layer, the broadband anti-reflection properties of optical thin films can be improved while simplifying the preparation. Precise time-controlled and oblique-angle deposition (OAD) methods were used to fabricate the broadband AR coating. By accurately measuring and adjusting the design errors for the thin and thick film layers, 22-layer and 36-layer AR coatings on a sapphire substrate with a 400-2000 nm wideband were obtained. This bottom-up preparation process and AR coating design have the potential to significantly enhance the broadband antireflective properties for many optical systems and reduce the manufacturing cost of broadband AR coatings.
WOS关键词SOLAR-CELLS ; FILMS ; PERFORMANCE ; INDEX
资助项目National Natural Science Foundation of China[61905238] ; National Natural Science Foundation of China[61705226] ; Instrument Developing Project of the Chinese Academy of Sciences[YJKYYQ20180067]
WOS研究方向Materials Science ; Physics
语种英语
WOS记录号WOS:000653714700001
出版者MDPI
资助机构National Natural Science Foundation of China ; Instrument Developing Project of the Chinese Academy of Sciences
源URL[http://ir.idsse.ac.cn/handle/183446/8688]  
专题深海工程技术部_深海视频技术研究室
通讯作者Li, Zizheng; Zhang, Binzhi
作者单位1.Southeast Univ, Sch Instrument Sci & Engn, Nanjing 210096, Peoples R China
2.Chinese Acad Sci, Inst Deep Sea Sci & Engn, Sanya 572000, Peoples R China
3.Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Key Lab Opt Syst Adv Mfg Technol, Changchun 130033, Peoples R China
4.JiHua Lab, Foshan 528200, Peoples R China
5.Chinese Acad Sci, Suzhou Inst Biomed Engn & Technol, Suzhou 215000, Peoples R China
推荐引用方式
GB/T 7714		 Guo, Xin,Quan, Xiangqian,Li, Zizheng,et al. Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods[J]. COATINGS,2021,11(5):10.
APA Guo, Xin.,Quan, Xiangqian.,Li, Zizheng.,Li, Qiang.,Zhang, Binzhi.,...&Song, Chi.(2021).Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods.COATINGS,11(5),10.
MLA Guo, Xin,et al."Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods".COATINGS 11.5(2021):10.

入库方式： OAI收割

来源：深海科学与工程研究所

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