Analysis of growth rate and crystal quality of AlN epilayers by flow-modulated metal organic chemical vapor deposition
文献类型：期刊论文
| 作者 | Fangzheng Li; Lianshan Wang ; Weizhen Yao ; Yulin Meng ; Shaoyan Yang; Zhanguo Wang |
| 刊名 | SUPERLATTICES AND MICROSTRUCTURES
 |
| 出版日期 | 2020 |
| 卷号 | 137页码:106336 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30660]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Fangzheng Li; Lianshan Wang ; Weizhen Yao ; Yulin Meng ;Shaoyan Yang; Zhanguo Wang. Analysis of growth rate and crystal quality of AlN epilayers by flow-modulated metal organic chemical vapor deposition[J]. SUPERLATTICES AND MICROSTRUCTURES,2020,137:106336. |
| APA | Fangzheng Li; Lianshan Wang ; Weizhen Yao ; Yulin Meng ;Shaoyan Yang; Zhanguo Wang.(2020).Analysis of growth rate and crystal quality of AlN epilayers by flow-modulated metal organic chemical vapor deposition.SUPERLATTICES AND MICROSTRUCTURES,137,106336. |
| MLA | Fangzheng Li; Lianshan Wang ; Weizhen Yao ; Yulin Meng ;Shaoyan Yang; Zhanguo Wang."Analysis of growth rate and crystal quality of AlN epilayers by flow-modulated metal organic chemical vapor deposition".SUPERLATTICES AND MICROSTRUCTURES 137(2020):106336. |
入库方式： OAI收割
来源：半导体研究所
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