Piezoelectric–Piezoresistive Coupling MEMS Sensors for Measurement of Electric Fields of Broad Bandwidth and Large Dynamic Range
文献类型：期刊论文
| 作者 | Fen Xue; Jun Hu; Yue Guo; Guowei Han; Yong Ouyang; Shan X. Wang; Jinliang He |
| 刊名 | IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
 |
| 出版日期 | 2020 |
| 卷号 | 67期号:1页码:551-559 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30702]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Fen Xue; Jun Hu; Yue Guo; Guowei Han; Yong Ouyang; Shan X. Wang; Jinliang He. Piezoelectric–Piezoresistive Coupling MEMS Sensors for Measurement of Electric Fields of Broad Bandwidth and Large Dynamic Range[J]. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS,2020,67(1):551-559. |
| APA | Fen Xue; Jun Hu; Yue Guo; Guowei Han; Yong Ouyang; Shan X. Wang; Jinliang He.(2020).Piezoelectric–Piezoresistive Coupling MEMS Sensors for Measurement of Electric Fields of Broad Bandwidth and Large Dynamic Range.IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS,67(1),551-559. |
| MLA | Fen Xue; Jun Hu; Yue Guo; Guowei Han; Yong Ouyang; Shan X. Wang; Jinliang He."Piezoelectric–Piezoresistive Coupling MEMS Sensors for Measurement of Electric Fields of Broad Bandwidth and Large Dynamic Range".IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS 67.1(2020):551-559. |
入库方式： OAI收割
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。