Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer
文献类型：期刊论文
| 作者 | Zhang, Lu; Xiang, Yang
|
| 刊名 | Zhongguo Jiguang/Chinese Journal of Lasers
 |
| 出版日期 | 2018 |
| 卷号 | 45期号:8 |
| 关键词 | Shearing Aberrations Errors Interferometers Measurement Wavefronts |
| ISSN号 | 2587025 |
| DOI | 10.3788/CJL201845.0804008 |
| 英文摘要 | The rotation absolute algorithm is stuided for the grating lateral-shearing interferometer, and the first 36-term Zernike polynomials are used to characterize the asymmetric term in the systemic errors of the shearing setup. The research results show that the relatively ideal measurement precision can be obtained after the systemic errors are removed if the absolute algorithm of surface figure testing is used to the testing of wavefront aberration in lens system. In addition, the RMS of the repeatability of the experimental data can approach 0.14 nm. 2018, Chinese Lasers Press. All right reserved. |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/60599]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Zhang, Lu,Xiang, Yang. Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2018,45(8). |
| APA | Zhang, Lu,&Xiang, Yang.(2018).Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer.Zhongguo Jiguang/Chinese Journal of Lasers,45(8). |
| MLA | Zhang, Lu,et al."Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer".Zhongguo Jiguang/Chinese Journal of Lasers 45.8(2018). |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。