Optical coatings for projection objective immersion lithography
文献类型：期刊论文
| 作者 | Bi, Dan-Dan; Zhang, Li-Chao ; Shi, Guang
|
| 刊名 | Chinese Optics
 |
| 出版日期 | 2018 |
| 卷号 | 11期号:5页码:745-764 |
| 关键词 | Optical films Integrated circuit manufacture Irradiation Lithography Optical coatings Optical systems |
| ISSN号 | 20951531 |
| DOI | 10.3788/CO.20181105.0745 |
| 英文摘要 | The deep ultraviolet lithography is currently a main method for integrated circuit manufacture. The immersive projection objective must be used to increase resolution of the optical system for realization of smaller component feature dimensions. Therefore a number of rigorous requirements for optical coating component are put forward. In this paper we present designs of the film material and film system applicable to immersive lithographical system as well as the large angle polarization-maintaining film system required for optical systems at high NA. Key issues about immersion environment adaptability, hydrophobicity and anti-contamination of the immersion coating most critical to the objective are discussed. Laser irradiation lifetime of the coated components especially in the immersion environment that is an important factor to evaluate performance of the immersive lithographical system is analyzed. 2018, China Science Publishing & Media LTD. All right reserved. |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/60746]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Bi, Dan-Dan,Zhang, Li-Chao,Shi, Guang. Optical coatings for projection objective immersion lithography[J]. Chinese Optics,2018,11(5):745-764. |
| APA | Bi, Dan-Dan,Zhang, Li-Chao,&Shi, Guang.(2018).Optical coatings for projection objective immersion lithography.Chinese Optics,11(5),745-764. |
| MLA | Bi, Dan-Dan,et al."Optical coatings for projection objective immersion lithography".Chinese Optics 11.5(2018):745-764. |
入库方式： OAI收割
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