Preparation and Spectrum Characterization of a High Quality Linear Variable Filter
文献类型：期刊论文
| 作者 | Tang, H. L.; Gao, J. S.; Zhang, J.; Wang, X. Y.; Fu, X. H. |
| 刊名 | Coatings
 |
| 出版日期 | 2018 |
| 卷号 | 8期号:9页码:11 |
| 关键词 | linear variable filter coatings dual ion beam sputtering film thickness correction spectrum analysis bandpass-filters optical-properties fabrication resolution coatings ta2o5 angle mask Materials Science |
| ISSN号 | 2079-6412 |
| DOI | 10.3390/coatings8090308 |
| 英文摘要 | To meet the requirements for lightweight, miniaturized dispersive optical systems for space applications, linear variable filters with a high transmittance and spatial dispersion coefficient are proposed. The filters were produced with dual ion beam sputtering, where a single layer thickness variation was achieved with a deposition rate adjustment based on a linear variable correction formula. A linear variable trend matching method was used to correct the film thickness based on the reduction of the mismatch error between two materials: Ta2O5 and SiO2. The influence of the spectral and spatial measuring average effects was addressed by sampling the spot size optimization. This paper presents an all-dielectric linear variable filter that operates between 520 and 1000 nm, with an excellent linear dependence of 40 nm/mm over 12 mm. The linear variable filter possessed a 2.5% bandwidth, and its transmittance was found to be >80% at the central wavelength of the band, with a 0.1% transmittance in the cut-off region. These results indicate great potential for optical devices for space applications, and the developed process has good reproducibility and stability. |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/60774]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Tang, H. L.,Gao, J. S.,Zhang, J.,et al. Preparation and Spectrum Characterization of a High Quality Linear Variable Filter[J]. Coatings,2018,8(9):11. |
| APA | Tang, H. L.,Gao, J. S.,Zhang, J.,Wang, X. Y.,&Fu, X. H..(2018).Preparation and Spectrum Characterization of a High Quality Linear Variable Filter.Coatings,8(9),11. |
| MLA | Tang, H. L.,et al."Preparation and Spectrum Characterization of a High Quality Linear Variable Filter".Coatings 8.9(2018):11. |
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