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Roughness Reduction of Large-Area High-Quality Thick Al Coatings for Large-Size Echelle Gratings by Chemical Mechanical Polishing

文献类型：期刊论文

作者Song, C.; Li, Z. Z.; Zhang, X.; Li, Q.; Yang, H. G.; Gao, J. S.; Xing, S.
刊名Nanoscience and Nanotechnology Letters
出版日期2018
卷号10期号:1页码:69-74
关键词Thick Al Coatings Echelle Grating Chemical Mechanical Polishing design telescope mirrors Science & Technology - Other Topics Materials Science Physics
ISSN号1941-4900
DOI10.1166/nnl.2018.2562
英文摘要Large-area high-quality thick Al coating is one of the most important factor which always acts as a ruling substrate in realizing high-performance large-size echelle grating ruling process. Based on our previous work, we proposed use of precise mechanical polishing methods to further reduce surface roughness of thick Al films. Surface roughness Rq of 12 mu m-thick Al film can be effectively controlled under 25 nm by early reported multi-step deposition process. The chemical mechanical polishing method was chosen in this study to improve the surface quality of thick Al coating. Rq of Al film was significantly reduced to 5.26 nm as a consequence. The surface morphology, cross section and film hardness of the polished samples were also investigated in detail. Finally, the echelle grating was fabricated on the polishing sample and the diffraction efficiency was 50% at 632.8 nm laser and 36th order. This work has great potential for both high-quality thick Al film research and large-size echelle grating performance enhancement.
源URL[http://ir.ciomp.ac.cn/handle/181722/60799]  
专题中国科学院长春光学精密机械与物理研究所
推荐引用方式
GB/T 7714		 Song, C.,Li, Z. Z.,Zhang, X.,et al. Roughness Reduction of Large-Area High-Quality Thick Al Coatings for Large-Size Echelle Gratings by Chemical Mechanical Polishing[J]. Nanoscience and Nanotechnology Letters,2018,10(1):69-74.
APA Song, C..,Li, Z. Z..,Zhang, X..,Li, Q..,Yang, H. G..,...&Xing, S..(2018).Roughness Reduction of Large-Area High-Quality Thick Al Coatings for Large-Size Echelle Gratings by Chemical Mechanical Polishing.Nanoscience and Nanotechnology Letters,10(1),69-74.
MLA Song, C.,et al."Roughness Reduction of Large-Area High-Quality Thick Al Coatings for Large-Size Echelle Gratings by Chemical Mechanical Polishing".Nanoscience and Nanotechnology Letters 10.1(2018):69-74.

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来源：长春光学精密机械与物理研究所

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