Tolerance assurance of interferometer for optical HCB process
文献类型：期刊论文
| 作者 | Yao, Dong; Li, Yu-Peng; Zhao, Ya; Wang, Zhi ; Sha, Wei; Wang, Yong-Xian
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| 刊名 | Guangxue Jingmi Gongcheng/Optics and Precision Engineering
 |
| 出版日期 | 2018 |
| 卷号 | 26期号:8页码:1945-1953 |
| 关键词 | Interferometers Catalysis Degrees of freedom (mechanics) Fillers Gravity waves Laser interferometry Position control |
| ISSN号 | 1004924X |
| DOI | 10.3788/OPE.20182608.1945 |
| 英文摘要 | Space interference measurement system is an important part of gravitational wave detection in space. This paper introduces the composition and working principle of a differential frequency interferometer made of only glass. To address the problem of matching and aligning double coherent beams in differential frequency interferometers, we introduce a method that can guarantee the angular and position tolerance of double frequency laser interferometers; this method is suitable for the hydroxide catalysis bonding assembly process. In the proposed method, an observation system is combined with a microadjustment mechanism. First, the monitoring system measures the relative position of light rays in real time. Next, the microadjustment mechanism adjusts the target device to micron-order resolution along three degrees of freedom, including two-dimensional planar movement and one-dimensional axial rotation. The monitoring and adjustment processes are iterated to achieve high-precision position and angular control of the optical components. Manual adjustments can ensure an angular tolerance and a position tolerance greater than 80 rad and 85 m, respectively. This scheme can meet the accuracy requirements of differential frequency laser interferometers and lay the foundation for achieving higher accuracy in the future. 2018, Science Press. All right reserved. |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/60841]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Yao, Dong,Li, Yu-Peng,Zhao, Ya,et al. Tolerance assurance of interferometer for optical HCB process[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2018,26(8):1945-1953. |
| APA | Yao, Dong,Li, Yu-Peng,Zhao, Ya,Wang, Zhi,Sha, Wei,&Wang, Yong-Xian.(2018).Tolerance assurance of interferometer for optical HCB process.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,26(8),1945-1953. |
| MLA | Yao, Dong,et al."Tolerance assurance of interferometer for optical HCB process".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 26.8(2018):1945-1953. |
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