A general method of designing phase-shifting algorithms for grating lateral shearing interferometry
文献类型：期刊论文
| 作者 | Fang, C. ; Xiang, Y.; Qi, K. Q.
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| 刊名 | Frontiers of Information Technology & Electronic Engineering
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| 出版日期 | 2018 |
| 卷号 | 19期号:6页码:809-814 |
| 关键词 | Interferometry Phase measurement Phase-shifting algorithms point-diffraction interferometer wave-front reconstruction hartmann-shack sensor spatial-resolution metrology optics euva Computer Science Engineering |
| ISSN号 | 2095-9184 |
| DOI | 10.1631/fitee.1601692 |
| 英文摘要 | We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method, four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method. |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/60866]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Fang, C.,Xiang, Y.,Qi, K. Q.. A general method of designing phase-shifting algorithms for grating lateral shearing interferometry[J]. Frontiers of Information Technology & Electronic Engineering,2018,19(6):809-814. |
| APA | Fang, C.,Xiang, Y.,&Qi, K. Q..(2018).A general method of designing phase-shifting algorithms for grating lateral shearing interferometry.Frontiers of Information Technology & Electronic Engineering,19(6),809-814. |
| MLA | Fang, C.,et al."A general method of designing phase-shifting algorithms for grating lateral shearing interferometry".Frontiers of Information Technology & Electronic Engineering 19.6(2018):809-814. |
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