Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method
文献类型：期刊论文
| 作者 | Shen, C.; Tan, X.; Jiao, Q. B.; Zhang, W.; Wu, N.; Bayan, H.; Qi, X. D. |
| 刊名 | Optics Express
 |
| 出版日期 | 2018 |
| 卷号 | 26期号:19页码:25381-25398 |
| 关键词 | imaging spectrometer hyperspectral imager ultraviolet algorithm alignment design Optics |
| ISSN号 | 1094-4087 |
| DOI | 10.1364/oe.26.025381 |
| 英文摘要 | A swing ion-beam etching method to fabricate convex blazed gratings used in shortwave infrared hyperspectral imaging spectrometers is presented. This method solves the consistency problem of blaze angles by swing etching through the meridian direction of the gratings. The mathematical relationship of the curvature, aperture, and diffraction efficiency of convex gratings is studied to demonstrate the limitation of conventional translational lithography and the necessity of swing etching. A geometric model is built to analyze the influence of swinging speed and beam slit width on groove evolution. Convex gratings with a 45.5 gr/mm groove density, 67 mm aperture, 156.88 mm radius of curvature, and 2.2 degrees blaze angle have been fabricated and measured where the peak and average diffraction efficiency in the shortwave infrared band reach 90% and 70%, respectively. Experimental results validate that high-efficiency convex gratings of small blaze angle and high groove consistency can be produced by swing etching, which satisfy the requirements for high spectral resolution and miniaturization of imaging spectrometers. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/60938]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Shen, C.,Tan, X.,Jiao, Q. B.,et al. Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method[J]. Optics Express,2018,26(19):25381-25398. |
| APA | Shen, C..,Tan, X..,Jiao, Q. B..,Zhang, W..,Wu, N..,...&Qi, X. D..(2018).Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method.Optics Express,26(19),25381-25398. |
| MLA | Shen, C.,et al."Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method".Optics Express 26.19(2018):25381-25398. |
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