Illumination uniformity improvement in digital micromirror device based scanning photolithography system
文献类型：期刊论文
| 作者 | Xiong, Z.; Liu, H. ; Chen, R. H.; Xu, J.; Li, Q. K.; Li, J. H.; Zhang, W. J.
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| 刊名 | Optics Express
 |
| 出版日期 | 2018 |
| 卷号 | 26期号:14页码:18597-18607 |
| 关键词 | maskless lithography dmd fabrication elements Optics |
| ISSN号 | 1094-4087 |
| DOI | 10.1364/oe.26.018597 |
| 英文摘要 | Illumination uniformity in photolithography systems determines the dimensional difference across the entire lithographic substrate. However, traditional lithography system relies on expensive and complex illumination system for achieving uniform illumination. In this paper, we propose a simple and cost-effective method based on the modulation of digital micromirror device to improve illumination uniformity. The modulation according to a digital mask achieved via an iteration program improves the uniformity to be above 95%. We demonstrate the effectiveness of the method by experimentally fabricating a linear grating. By implementing this method, the maximum dimensional difference is decreased from 3.3 mu m to 0.3 mu m. Further simulations indicate that higher uniformity is achievable once the field of view on the DMD is divided into smaller subregions. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/61025]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Xiong, Z.,Liu, H.,Chen, R. H.,et al. Illumination uniformity improvement in digital micromirror device based scanning photolithography system[J]. Optics Express,2018,26(14):18597-18607. |
| APA | Xiong, Z..,Liu, H..,Chen, R. H..,Xu, J..,Li, Q. K..,...&Zhang, W. J..(2018).Illumination uniformity improvement in digital micromirror device based scanning photolithography system.Optics Express,26(14),18597-18607. |
| MLA | Xiong, Z.,et al."Illumination uniformity improvement in digital micromirror device based scanning photolithography system".Optics Express 26.14(2018):18597-18607. |
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