Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm
文献类型：期刊论文
| 作者 | Kuang, S. Q.; Gong, X. P.; Yang, H. G. |
| 刊名 | Optics Communications
 |
| 出版日期 | 2018 |
| 卷号 | 410页码:805-810 |
| 关键词 | Multilayers Multilayer design X-ray Soft X-rays Extreme ultraviolet Thin films x-ray genetic algorithm mirrors fabrication reflectivity optimization coatings Optics |
| ISSN号 | 0030-4018 |
| DOI | 10.1016/j.optcom.2017.11.045 |
| 英文摘要 | Considering the random fluctuations of the layer thickness, a method of robust design of broadband EUV multilayers based on multi-objective evolutionary algorithm is presented. Owing to the optimization of multiobjective evolutionary algorithm, the optical performance and robust quality of broadband Mo/Si multilayer can be optimized simultaneously, and then a set of robust designs of aperiodic EUV multilayers, which are insensitive to the thickness errors can be obtained in one single simulation run. The robust designs of broadband Mo/Si multilayers could be used to reduce the production risks of EUV mirrors, and this research demonstrates a great potential of application of multi-objective evolutionary algorithm on the design of optical thin film. (C) 2017 Elsevier B.V. All rights reserved. |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/61140]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Kuang, S. Q.,Gong, X. P.,Yang, H. G.. Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm[J]. Optics Communications,2018,410:805-810. |
| APA | Kuang, S. Q.,Gong, X. P.,&Yang, H. G..(2018).Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm.Optics Communications,410,805-810. |
| MLA | Kuang, S. Q.,et al."Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm".Optics Communications 410(2018):805-810. |
入库方式： OAI收割
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