The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution
文献类型：期刊论文
| 作者 | Jiao, Q. B.; Zhu, C. L.; Tan, X.; Qi, X. D.; Bayanheshig |
| 刊名 | Ultrasonics Sonochemistry
 |
| 出版日期 | 2018 |
| 卷号 | 40页码:937-943 |
| 关键词 | Surface roughness Silicon echelle grating Ultrasonic agitation Surfactant additive extreme-ultraviolet si agitation alcohol Acoustics Chemistry |
| ISSN号 | 1350-4177 |
| DOI | 10.1016/j.ultsonch.2017.09.011 |
| 英文摘要 | In the silicon echelle grating fabrication process, the "pseudo-mask" formed by the hydrogen bubbles generated during the etching process is the reason causing high surface roughness and poor surface quality of blazed plane. Based upon the ultrasonic mechanical effect and contact angle reduced by surfactant additive, ultrasonic vibration, isopropyl alcohol (IPA) and 2,4,7,9-Tetramethyl-5-decyne-4,7-diol (TMDD) were used to improve surface quality of 53.5 gr/mm echelle grating. The surface roughness R-q is smaller than 18 nm, 7 nm and 2 nm when using ultrasonic vibration, IPA and TMDD respectively. The surface roughness Rq is smaller than 5 nm and 1.5 nm respectively when combining ultrasonic vibration with IPA and TMDD. The experimental results indicated that the combination of ultrasonic agitation and surfactant additive (IPA & TMDD) could obtain a lower surface roughness of blazed plane in silicon echelle grating fabrication process. |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/61180]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Jiao, Q. B.,Zhu, C. L.,Tan, X.,et al. The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution[J]. Ultrasonics Sonochemistry,2018,40:937-943. |
| APA | Jiao, Q. B.,Zhu, C. L.,Tan, X.,Qi, X. D.,&Bayanheshig.(2018).The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution.Ultrasonics Sonochemistry,40,937-943. |
| MLA | Jiao, Q. B.,et al."The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution".Ultrasonics Sonochemistry 40(2018):937-943. |
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