Two-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer
文献类型：期刊论文
| 作者 | Zhang, L.; Qi, K. Q.; Xiang, Y.
|
| 刊名 | Optics Express
 |
| 出版日期 | 2018 |
| 卷号 | 26期号:11页码:14267-14277 |
| 关键词 | spherical surfaces absolute deviation metrology flat maps Optics |
| ISSN号 | 1094-4087 |
| DOI | 10.1364/oe.26.014267 |
| 英文摘要 | The grating lateral shearing interferometer may achieve ultra-high accuracy absolute testing after eliminating the systemic errors from the interferometer itself and the orthogonality problem between two shearing directions. Aiming at the interferometer, we proposed a two-step algorithm for removing the rotationally asymmetric systemic errors from our shearing setup. This rotation method provides a new approach for acquiring the wavefront aberration by choosing the rotation angles with the minimum decentration and to satisfy the immune of systemic errors at the same time. Simulation and experiment verified that it is more propitious to eliminate the systemic errors when it is applied to our shearing setup. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/61207]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Zhang, L.,Qi, K. Q.,Xiang, Y.. Two-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer[J]. Optics Express,2018,26(11):14267-14277. |
| APA | Zhang, L.,Qi, K. Q.,&Xiang, Y..(2018).Two-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer.Optics Express,26(11),14267-14277. |
| MLA | Zhang, L.,et al."Two-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer".Optics Express 26.11(2018):14267-14277. |
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