Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H-2 plasma
文献类型：期刊论文
| 作者 | Y.Wang; Q.P.Lu; Y.G.Gao; X.P.Gong; Y.Song |
| 刊名 | Nuclear Science and Techniques
 |
| 出版日期 | 2019 |
| 卷号 | 30期号:2页码:9 |
| 关键词 | Radio-frequency plasma,X-ray irradiation,Carbon contamination,hydrogen,ion,erosion,Nuclear Science & Technology,Physics |
| ISSN号 | 1001-8042 |
| DOI | 10.1007/s41365-019-0547-9 |
| 英文摘要 | Removal of X-ray-induced carbon contamination on beamline optics was studied using radio-frequency plasma with an argon/hydrogen (Ar/H-2) mixture. Experiments demonstrated that the carbon removal rate with Ar/H-2 plasma was higher than that with pure hydrogen or argon. The possible mechanism for this enhanced removal was discussed. The key working parameters for Ar/H-2 plasma removal were determined, including the optimal vacuum pressure, gas mixing ratio, and source power. The optimal process was performed on a carbon-coated multilayer, and the reflectivity was recovered. |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/62974]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Y.Wang,Q.P.Lu,Y.G.Gao,et al. Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H-2 plasma[J]. Nuclear Science and Techniques,2019,30(2):9. |
| APA | Y.Wang,Q.P.Lu,Y.G.Gao,X.P.Gong,&Y.Song.(2019).Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H-2 plasma.Nuclear Science and Techniques,30(2),9. |
| MLA | Y.Wang,et al."Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H-2 plasma".Nuclear Science and Techniques 30.2(2019):9. |
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