Revealing the Role of Sidewall Orientation in Wet Chemical Etching of GaN-Based Ultraviolet Light-Emitting Diodes
文献类型：期刊论文
| 作者 | H.Wan; B.Tang; N.Li; S.J.Zhou; C.Q.Gui; S.Liu |
| 刊名 | Nanomaterials
 |
| 出版日期 | 2019 |
| 卷号 | 9期号:3页码:8 |
| 关键词 | GaN-based UV LED,wet chemical etching,prism-structured sidewall,crystal orientation,light extraction,efficiency,surface,plane,enhancement,extraction,layer,Science & Technology - Other Topics,Materials Science |
| ISSN号 | 2079-4991 |
| DOI | 10.3390/nano9030365 |
| 英文摘要 | We demonstrated that the tetramethylammonium hydroxide (TMAH) solution possesses different etching abilities to the chip sidewalls with different orientations because the orientation of chip sidewall determines the exposed crystallographic plane of gallium nitride (GaN) and these crystallographic planes are with different chemical stability to the TMAH solution. After TMAH etching treatment, trigonal prisms were observed on sidewalls where m-plane GaN was exposed. For the investigated two types of light-emitting diodes (LEDs) with orthogonal arrangements, the LEDs with their larger sidewalls orientated along the [11-20] direction exhibited an additional 10% improvement in light output power after TMAH etching treatment compared to the LEDs with larger sidewalls orientated along the [1-100] direction. |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/63029]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | H.Wan,B.Tang,N.Li,et al. Revealing the Role of Sidewall Orientation in Wet Chemical Etching of GaN-Based Ultraviolet Light-Emitting Diodes[J]. Nanomaterials,2019,9(3):8. |
| APA | H.Wan,B.Tang,N.Li,S.J.Zhou,C.Q.Gui,&S.Liu.(2019).Revealing the Role of Sidewall Orientation in Wet Chemical Etching of GaN-Based Ultraviolet Light-Emitting Diodes.Nanomaterials,9(3),8. |
| MLA | H.Wan,et al."Revealing the Role of Sidewall Orientation in Wet Chemical Etching of GaN-Based Ultraviolet Light-Emitting Diodes".Nanomaterials 9.3(2019):8. |
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