Effect of thickness non-uniformity of large-area grating metal film on grating diffraction wavefront
文献类型：期刊论文
| 作者 | X.T.Mi; S.W.Zhang; X.D.Qi; H.Z.Yu; J.X.Zhou; S.B.Jiang |
| 刊名 | Optics and Laser Technology
 |
| 出版日期 | 2019 |
| 卷号 | 119页码:6 |
| 关键词 | Gratings,Metal film thickness non-uniformity,Grating diffraction,wavefront error,echelle gratings,error,resolution,Optics,Physics |
| ISSN号 | 0030-3992 |
| DOI | 10.1016/j.optlastec.2019.105675 |
| 英文摘要 | As the grating area increases, the non-uniformity of the metal film thickness becomes one of the main factors affecting both the grating surface error and the wavefront of the grating diffraction order. We study the theoretical model of the relationship between the metal film thickness non-uniformity and the grating diffraction wavefront error, analyze the effects of the relevant factors on the thickness of the metal films, and determine the values of these factors using theoretical and experimental methods. We also perform a ruling experiment to verify that the wavefront quality of the grating increases with improvement in the film thickness uniformity. |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/63135]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | X.T.Mi,S.W.Zhang,X.D.Qi,et al. Effect of thickness non-uniformity of large-area grating metal film on grating diffraction wavefront[J]. Optics and Laser Technology,2019,119:6. |
| APA | X.T.Mi,S.W.Zhang,X.D.Qi,H.Z.Yu,J.X.Zhou,&S.B.Jiang.(2019).Effect of thickness non-uniformity of large-area grating metal film on grating diffraction wavefront.Optics and Laser Technology,119,6. |
| MLA | X.T.Mi,et al."Effect of thickness non-uniformity of large-area grating metal film on grating diffraction wavefront".Optics and Laser Technology 119(2019):6. |
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