中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Imaging quality evaluation of soft X-ray grazing incidence telescope

文献类型:期刊论文

作者P.Liu; B.Chen; Y.-C.Zhang; L.-P.He; X.-D.Wang
刊名Guangxue Jingmi Gongcheng/Optics and Precision Engineering
出版日期2019
卷号27期号:10页码:2136-2143
关键词Image quality,Errors,MATLAB,Optical systems,Plasma interactions,Quality control,Surface scattering,Telescopes,X ray optics,X ray scattering,X rays
ISSN号1004924X
DOI10.3788/OPE.20192710.2136
英文摘要In order to evaluate the imaging quality of the soft X-ray grazing incidence telescope, an image quality evaluation method using ZEMAX and MATLAB is proposed. The image quality evaluation program written according to this method not only considers the aperture diffraction, the geometric aberration and the alignment errors, but also adds the telescope surface figure errors and the surface scatter effects. Using the Legendre-Fourier polynomial and User Defined Surface, a cylindrical mirror model with figure errors is created in ZEMAX, to simulate the real surface profile grazing incidence telescope. The BSDF scattering model is established according to the Harvey-Shack surface scattering theory to simulate X-ray scattering. The X-ray finite distance imaging experimental facility is built for verifying the image quality evaluation program. The comparison between the experimental results and the simulation results of the image quality evaluation program shows that the light intensity distribution of the experimental spot and simulation spot is basically the same. Using the experimental result as a standard, the relative errors of the horizontal and longitudinal directions of the simulated spot FWHM were 14.7% and 11.3%, respectively. It is proved that the simulation results of the image quality evaluation program are credible and have certain guiding significance for the design and processing of the grazing incidence optical system. 2019, Science Press. All right reserved.
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源URL[http://ir.ciomp.ac.cn/handle/181722/63189]  
专题中国科学院长春光学精密机械与物理研究所
推荐引用方式
GB/T 7714
P.Liu,B.Chen,Y.-C.Zhang,et al. Imaging quality evaluation of soft X-ray grazing incidence telescope[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2019,27(10):2136-2143.
APA P.Liu,B.Chen,Y.-C.Zhang,L.-P.He,&X.-D.Wang.(2019).Imaging quality evaluation of soft X-ray grazing incidence telescope.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,27(10),2136-2143.
MLA P.Liu,et al."Imaging quality evaluation of soft X-ray grazing incidence telescope".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 27.10(2019):2136-2143.

入库方式: OAI收割

来源:长春光学精密机械与物理研究所

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