Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine
文献类型：期刊论文
| 作者 | Y.P.Li; Y.Zhao; Z.Wang; C.Fang; W.Sha |
| 刊名 | Ieee Access
 |
| 出版日期 | 2019 |
| 卷号 | 7页码:112736-112741 |
| 关键词 | Laser beams,measurement,retroreflector,hydroxide-catalysis bonding,coordinate measuring machine,calibration,Computer Science,Engineering,Telecommunications |
| ISSN号 | 2169-3536 |
| DOI | 10.1109/access.2019.2934829 |
| 英文摘要 | A high-precision stability measurement scheme was designed and prototyped with the purpose of ensuring precise laser beam alignment during the assembly of an integrated interferometer. With retroreflectors added, the angular resolution of the system is improved while ensuring system stability. Hydroxide-catalysis bonding technology is used to create a stress-free bond between the various optical components of the system. After calibration using the coordinate measuring machine, the device achieved a measurement accuracy of +/- 6 mu m for the absolute position of the laser beam in the global coordinate system. In angular measurements, an accuracy of +/- 21 mu rad was attained. Over a 2-month period, the maximum positional drifts and the maximum angular drifts of the calibration parameters were +/- 3 mu m and +/- 27 mu rad, respectively. |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/63231]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Y.P.Li,Y.Zhao,Z.Wang,et al. Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine[J]. Ieee Access,2019,7:112736-112741. |
| APA | Y.P.Li,Y.Zhao,Z.Wang,C.Fang,&W.Sha.(2019).Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine.Ieee Access,7,112736-112741. |
| MLA | Y.P.Li,et al."Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine".Ieee Access 7(2019):112736-112741. |
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