Design and fabrication of robust broadband extreme ultraviolet multilayers
文献类型：期刊论文
| 作者 | S.Q.Kuang; J.B.Wang; H.G.Yang; T.L.Huo; H.J.Zhou |
| 刊名 | Aip Advances
 |
| 出版日期 | 2019 |
| 卷号 | 9期号:4页码:5 |
| 关键词 | mirrors,Science & Technology - Other Topics,Materials Science,Physics |
| DOI | 10.1063/1.5057714 |
| 英文摘要 | The robust designs of broadband extreme ultraviolet multilayers based on the multiobjective genetic algorithm are validated experimentally. In order to reduce the influence of random layer thickness fluctuations on the great deformation of the experimental reflection of extreme ultraviolet multilayer with a wide angular band, the multiobjective genetic algorithm has been improved to optimize the multilayer system composed by the layer thicknesses which can be controlled precisely. The robust designs of broadband Mo/Si multilayers were fabricated, and the experimental results were presented and analyzed, and then the advantage of robust multilayer designs was demonstrated. (C) 2019 Author(s). |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/63284]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | S.Q.Kuang,J.B.Wang,H.G.Yang,et al. Design and fabrication of robust broadband extreme ultraviolet multilayers[J]. Aip Advances,2019,9(4):5. |
| APA | S.Q.Kuang,J.B.Wang,H.G.Yang,T.L.Huo,&H.J.Zhou.(2019).Design and fabrication of robust broadband extreme ultraviolet multilayers.Aip Advances,9(4),5. |
| MLA | S.Q.Kuang,et al."Design and fabrication of robust broadband extreme ultraviolet multilayers".Aip Advances 9.4(2019):5. |
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