Micro-textures inversely designed with overlayed-lithography manufacturability for wetting behavior in CassieBaxter status
文献类型：期刊论文
| 作者 | Y.Deng; Z.Liu; Y.Wang; H.Duan; J.G.Korvink |
| 刊名 | Applied Mathematical Modelling
 |
| 出版日期 | 2019 |
| 卷号 | 74页码:621-640 |
| 关键词 | Lithography,Aspect ratio,Design,Extrusion,Liquids |
| ISSN号 | 0307904X |
| DOI | 10.1016/j.apm.2019.04.059 |
| 英文摘要 | Robust CassieBaxter wettability of a rough solid surface with micro-textures is a key factor for stable hydrophobicity. Overlayed micro-textures are potentially more effective in ensuring the robustness of the surface properties, because of the layer-by-layer increase of the duty ratio and their effective approximation of the full hierarchy. However, a design methodology that includes considering manufacturability is lacking. In this article, we address this deficiency and present a monolithic inverse design approach, composed of a series of topology optimizations, to derive micro-textures with hierarchy approximated by overlayed geometries. The optimization are implemented in a dimensionless manner using a periodic regular-polygon tiling of the plane, in which the corresponding dimensionless Young-Laplace equation is used to describe the physics at the liquid/vapor interface. Two sequential and neighboring optimization tasks are linked through the design domain of the downward layer, determined by a conformal extension of the physical density representing the pattern of the upward layer. This ensures the manufacturability e.g. for an overlayed lithography process. Layer-by-layer robustness enhancement is thereby achieved, and the capability to anchor the three-phase contact line after the collapse of the liquid/vapor interface supported by the upward layer. In generating the overlayed micro-textures, a rigorous scaling factor for the patterns was determined, leading to a recursion inequality based on the depth of the liquid/vapor interfaces at the critical static pressures that determines the extrusion distance of the patterns. The trace height and minimal aspect ratio of the micro-textures are specified by the scaling factor and extrusion distance for a layer. This allows a compromise between performance and manufacturability, and thereby avoid instabilities caused by elasto-capillary collapse of the micro-/nano-structures. We computationally confirm the optimality by comparing the derived micro-textures with previously reported designs. 2019 Elsevier Inc. |
| URL标识 | 查看原文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/63421]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Y.Deng,Z.Liu,Y.Wang,et al. Micro-textures inversely designed with overlayed-lithography manufacturability for wetting behavior in CassieBaxter status[J]. Applied Mathematical Modelling,2019,74:621-640. |
| APA | Y.Deng,Z.Liu,Y.Wang,H.Duan,&J.G.Korvink.(2019).Micro-textures inversely designed with overlayed-lithography manufacturability for wetting behavior in CassieBaxter status.Applied Mathematical Modelling,74,621-640. |
| MLA | Y.Deng,et al."Micro-textures inversely designed with overlayed-lithography manufacturability for wetting behavior in CassieBaxter status".Applied Mathematical Modelling 74(2019):621-640. |
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