Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors
文献类型：期刊论文
| 作者 | C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao |
| 刊名 | Applied Sciences-Basel
 |
| 出版日期 | 2020 |
| 卷号 | 10期号:15页码:13 |
| DOI | 10.3390/app10155057 |
| 英文摘要 | A compact laser collimation system is presented for the simultaneous measurement of five-degree-of-freedom motion errors. The optical configuration of the proposed system is designed, and the principle of the measurement of five-degree-of-freedom errors is described in detail. The resolution of the roll and the horizontal straightness is doubled compared with other laser collimation methods. A common optical path compensation method is provided to detect light drift in real time and compensate for straightness and angle errors. An experimental setup is constructed, and a series of experiments are performed to verify the feasibility and stability of the system. Compared with commercial instruments, the pitch and yaw residuals are +/- 2.5 '' and +/- 3.5 '' without correction, and the residuals are +/- 1.9 '' and +/- 2.8 '' after correction, respectively. The comparison deviations of the horizontal straightness and vertical straightness changed from +/- 4.8 mu m to +/- 2.8 mu m and +/- 5.9 mu m to +/- 3.6 mu m, respectively. The comparison deviation of the roll is +/- 4.3 ''. The experimental results show that the data of the five-degree-of-freedom measurement system obtained are largely the same as the measurement data of commercial instruments. The common optical path compensation can effectively improve the measurement accuracy of the system. |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/64369]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao. Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors[J]. Applied Sciences-Basel,2020,10(15):13. |
| APA | C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao.(2020).Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors.Applied Sciences-Basel,10(15),13. |
| MLA | C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao."Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors".Applied Sciences-Basel 10.15(2020):13. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。