中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Construction of freeform mirrors for an off-axis telecentric scanning system through multiple surfaces expansion and mixing

文献类型:期刊论文

作者L. Chen,Z. S. Gao,N. Y. Xu,X. Cao,J. P. Zhang,L. J. Wang,J. F. Ye and Q. Yuan
刊名Results in Physics
出版日期2020
卷号19页码:11
ISSN号2211-3797
DOI10.1016/j.rinp.2020.103354
英文摘要In this paper, a direct design method for an off-axis two-mirror telecentric scanning system with a linear field of view (FOV) is proposed. A single freeform mirror structure is firstly considered, in which the aberration free geometry of the off-axis parabolic (OAP) surface is leveraged to provide the focusing function and build surface contour of the sub-region on the mirror for each FOV. Multiple OAP surfaces for construction of the freeform mirror are located at an OAP base to satisfy the telecentric condition. The imaging distortion of this single freeform mirror structure is analyzed and found unavoidable due to the unsymmetrical geometry of the OAP base. A freeform reflective corrector is supplemented, and it is constructed from multiple plane surfaces located at a curved base to fulfill the f-theta scanning geometry. Thus, a two-mirror structure composed of one freeform primary mirror and one freeform reflective corrector is established. Each plane-OAP surfaces pair corresponds to a specific FOV. These multiple OAP surfaces and multiple plane surfaces are then expanded and mixed respectively, to construct the freeform primary mirror and freeform reflective corrector. An f-theta two-mirror freeform scanning system with +/- 10.4 degrees linear FOV is designed using the proposed construction method. The design result is diffraction-limited, and a scanning error less than 5 mu m and telecentricity angle less than 0.2 degrees are achieved.
URL标识查看原文
语种英语
源URL[http://ir.ciomp.ac.cn/handle/181722/64382]  
专题中国科学院长春光学精密机械与物理研究所
推荐引用方式
GB/T 7714
L. Chen,Z. S. Gao,N. Y. Xu,X. Cao,J. P. Zhang,L. J. Wang,J. F. Ye and Q. Yuan. Construction of freeform mirrors for an off-axis telecentric scanning system through multiple surfaces expansion and mixing[J]. Results in Physics,2020,19:11.
APA L. Chen,Z. S. Gao,N. Y. Xu,X. Cao,J. P. Zhang,L. J. Wang,J. F. Ye and Q. Yuan.(2020).Construction of freeform mirrors for an off-axis telecentric scanning system through multiple surfaces expansion and mixing.Results in Physics,19,11.
MLA L. Chen,Z. S. Gao,N. Y. Xu,X. Cao,J. P. Zhang,L. J. Wang,J. F. Ye and Q. Yuan."Construction of freeform mirrors for an off-axis telecentric scanning system through multiple surfaces expansion and mixing".Results in Physics 19(2020):11.

入库方式: OAI收割

来源:长春光学精密机械与物理研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。