Effect of the changes in refractive index of air on grating diffraction wavefront
文献类型:期刊论文
作者 | X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou |
刊名 | Optics Communications
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出版日期 | 2020 |
卷号 | 457页码:7 |
ISSN号 | 0030-4018 |
DOI | 10.1016/j.optcom.2019.124716 |
英文摘要 | Reduction of groove errors on the grating wavefront caused by the refractive index of air is a critical issue in ruling grating fabrication when using an interferometer to provide position feedback. We establish a mathematical model of the relationship between the grating wavefront and the refractive index of air. We then introduce two methods to measure the air's refractive index, analyze the effects of temperature, pressure and humidity on the grating wavefront, and use the advantages of the two methods to obtain the groove error compensation value. Comparative ruling experiments prove that grating wavefront quality is significantly improved after compensation of the groove errors caused by the refractive index of air. |
URL标识 | 查看原文 |
语种 | 英语 |
源URL | [http://ir.ciomp.ac.cn/handle/181722/64473] ![]() |
专题 | 中国科学院长春光学精密机械与物理研究所 |
推荐引用方式 GB/T 7714 | X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou. Effect of the changes in refractive index of air on grating diffraction wavefront[J]. Optics Communications,2020,457:7. |
APA | X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou.(2020).Effect of the changes in refractive index of air on grating diffraction wavefront.Optics Communications,457,7. |
MLA | X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,Y. Lin,X. F. Yao,S. B. Jiang and J. X. Zhou."Effect of the changes in refractive index of air on grating diffraction wavefront".Optics Communications 457(2020):7. |
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