Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront
文献类型：期刊论文
| 作者 | X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun |
| 刊名 | Applied Optics
 |
| 出版日期 | 2020 |
| 卷号 | 59期号:27页码:8465-8471 |
| ISSN号 | 1559-128X |
| DOI | 10.1364/ao.399147 |
| 英文摘要 | Measuring mirror requirements and their impact on groove errors are related to the error compensation strategy for a ruling engine. We analyze why the measuring mirror of the CIOMP-6 engine affects the groove straightness and the grating diffraction wavefront. We study a theoretical model of the relationship between the measuring mirror's surface shape error and the grating wavefront, propose a requirement for the measuring mirror surface shape error, and reprocess the measuring mirror. Comparative ruling experiments prove that the grating's wavefront quality at the diffraction order along the groove direction improved significantly after reprocessing of the measuring mirror. (C) 2020 Optical Society of America |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/64474]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun. Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront[J]. Applied Optics,2020,59(27):8465-8471. |
| APA | X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun.(2020).Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront.Applied Optics,59(27),8465-8471. |
| MLA | X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun."Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront".Applied Optics 59.27(2020):8465-8471. |
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