Heterodyne period measurement in a scanning beam interference lithography system
文献类型：期刊论文
| 作者 | S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig |
| 刊名 | Applied Optics
 |
| 出版日期 | 2020 |
| 卷号 | 59期号:19页码:5830-5836 |
| ISSN号 | 1559-128X |
| DOI | 10.1364/ao.393865 |
| 英文摘要 | The interference fringe period is an important phase-locking parameter in the scanning beam interference lithography (SBIL) system. To measure the interference fringe period accurately, a heterodyne period measurement method is proposed. Compared with traditional methods, the requirements for the stage motion characteristics are greatly reduced. In this paper, the theoretical error of the period measurement method is analyzed and relevant experiments are performed. The results show that the average period measurement value is 555.539 nm and the standard deviation of measurement repeatability is 2.5 pm. This method is significant for holographic grating fabrication using the SBIL system. (C) 2020 Optical Society of America |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/64549]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig. Heterodyne period measurement in a scanning beam interference lithography system[J]. Applied Optics,2020,59(19):5830-5836. |
| APA | S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig.(2020).Heterodyne period measurement in a scanning beam interference lithography system.Applied Optics,59(19),5830-5836. |
| MLA | S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig."Heterodyne period measurement in a scanning beam interference lithography system".Applied Optics 59.19(2020):5830-5836. |
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