中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Numerical calculation of the mosaic error between mosaic gratings

文献类型:期刊论文

作者G. J. Yang,X. D. Qi,X. T. Mi,S. W. Zhang,H. Z. Yu,H. L. Yu,X. T. Li and S. Yang
刊名Applied Optics
出版日期2020
卷号59期号:13页码:4048-4054
ISSN号1559-128X
DOI10.1364/ao.389274
英文摘要The theoretical calculation model for a mosaic error was established based on the plane equation for a grating surface and the relationship equation for a mosaic grating surface. A mosaic grating was obtained based on this model. In the experiment, the mosaic error was calculated based on the diffraction wavefronts of two groups of mosaic gratings that were obtained simultaneously with a Zygo interferometer. The difference between the wavefront of the mosaic grating and the average wavefront of the mosaic grating element was 0.031 lambda. The maximum far-field intensity of the mosaic grating was 90% of that without an error. This model provides a theoretical basis for the numerical mosaic between gratings. In addition, the mosaic error can be calculated with this model, and the quality of the mosaic grating can be evaluated. (C) 2020 Optical Society of America
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语种英语
源URL[http://ir.ciomp.ac.cn/handle/181722/64736]  
专题中国科学院长春光学精密机械与物理研究所
推荐引用方式
GB/T 7714
G. J. Yang,X. D. Qi,X. T. Mi,S. W. Zhang,H. Z. Yu,H. L. Yu,X. T. Li and S. Yang. Numerical calculation of the mosaic error between mosaic gratings[J]. Applied Optics,2020,59(13):4048-4054.
APA G. J. Yang,X. D. Qi,X. T. Mi,S. W. Zhang,H. Z. Yu,H. L. Yu,X. T. Li and S. Yang.(2020).Numerical calculation of the mosaic error between mosaic gratings.Applied Optics,59(13),4048-4054.
MLA G. J. Yang,X. D. Qi,X. T. Mi,S. W. Zhang,H. Z. Yu,H. L. Yu,X. T. Li and S. Yang."Numerical calculation of the mosaic error between mosaic gratings".Applied Optics 59.13(2020):4048-4054.

入库方式: OAI收割

来源:长春光学精密机械与物理研究所

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