Performance improvement of amorphous Ga 2 O 3 ultraviolet photodetector by annealing under oxygen atmosphere
文献类型：期刊论文
| 作者 | C. Q. Zhou,K. W. Liu,X. Chen,J. H. Feng,J. L. Yang,Z. Z. Zhang,L. Liu,Y. Xia and D. Z. Shen |
| 刊名 | Journal of Alloys and Compounds
 |
| 出版日期 | 2020 |
| 卷号 | 840页码:7 |
| ISSN号 | 0925-8388 |
| DOI | 10.1016/j.jallcom.2020.155585 |
| 英文摘要 | We have demonstrated the fast-speed and high-rejection-ratio solar-blind ultraviolet (UV) photodetectors based on amorphous Ga2O3 (a-Ga2O3) films grown by atomic layer deposition. The effect of the annealing under oxygen atmosphere on the performance of a-Ga2O3 photodetectors is investigated. By the oxygen annealing at 500 C, the 90-10% decay time of a-Ga2O3 photodetector can be decreased to ~150 ns, and the UV/Visible rejection ratio of the photodetector can reach as high as 2.74 105, due to the significant suppression of the visible light response. Moreover, the dark current of the 500 C-annealed photodetector is only 9.43 pA at 10 V bias. These phenomena can be explained by the decrease in oxygen vacancy concentration of the a-Ga2O3 films after the oxygen annealing. The combination of high rejection ratios and fast operating speeds offers a viable way for facile and scalable fabrication of the oxide semiconductor solar-blind UV detectors. |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/64783]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | C. Q. Zhou,K. W. Liu,X. Chen,J. H. Feng,J. L. Yang,Z. Z. Zhang,L. Liu,Y. Xia and D. Z. Shen. Performance improvement of amorphous Ga 2 O 3 ultraviolet photodetector by annealing under oxygen atmosphere[J]. Journal of Alloys and Compounds,2020,840:7. |
| APA | C. Q. Zhou,K. W. Liu,X. Chen,J. H. Feng,J. L. Yang,Z. Z. Zhang,L. Liu,Y. Xia and D. Z. Shen.(2020).Performance improvement of amorphous Ga 2 O 3 ultraviolet photodetector by annealing under oxygen atmosphere.Journal of Alloys and Compounds,840,7. |
| MLA | C. Q. Zhou,K. W. Liu,X. Chen,J. H. Feng,J. L. Yang,Z. Z. Zhang,L. Liu,Y. Xia and D. Z. Shen."Performance improvement of amorphous Ga 2 O 3 ultraviolet photodetector by annealing under oxygen atmosphere".Journal of Alloys and Compounds 840(2020):7. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。